Vacuum Side-Channel Compressor

Abstract

A vacuum side channel compressor ( 10 ) comprises a pump stator ( 14 ) and a pump rotor ( 12 ), which surround a side channel ( 31,32,33,34 ). An axial bearing ( 22 ) is provided for mounting the pump rotor ( 12 ). A sealing gap ( 40 ) is formed next to the side channel between the pump stator ( 14 ) and the pump rotor ( 12 ), part of which forms a conical ring whose imaginary cone apex ( 50 ) lies in the vicinity of the axial bearing ( 22 ).

1 . A vacuum side channel compressor comprising
 a pump stator and a pump rotor which together surround a side channel,   an axial bearing for supporting the pump rotor, and   a sealing gap being formed next to the side channel between the pump stator and the pump rotor, the sealing gap forming a conical ring, with an imaginary cone apex arranged on an axial line of the pump rotor in the vicinity of the axial bearing.   
   
   
       2 . The vacuum side channel compressor according to  claim 1 , wherein the cone apex is spaced from the axial bearing by no more than half of its support length. 
   
   
       3 . The vacuum side channel compressor according to  claim 1 , wherein the cone apex is spaced from the axial bearing by no more than half of a length of the axial bearing. 
   
   
       4 . The vacuum side channel compressor according to  claim 1 , wherein at least two side channels are provided. 
   
   
       5 . The vacuum side channel compressor according to  claim 4 , wherein the side channels are arranged in a common radial plane. 
   
   
       6 . The vacuum side channel compressor according to  claim 1 , wherein a non-conical part of a gap is arranged between two side channels in a radial plane and/or on a cylindrical surface. 
   
   
       7 . The vacuum side channel compressor according to  1 , wherein a cross section of a respective outer side channel is larger than that of the adjacent inner side channel. 
   
   
       8 . A vacuum side channel compressor comprising:
 a stator and a rotor which define a plurality of side channels disposed concentrically around an axis of rotation of the rotor;   the rotor and the stator defining a plurality of sealing surfaces separated by a sealing gap, the sealing surfaces being disposed between adjacent side channels, the sealing surfaces being disposed along conical surfaces which project to a common imaginary apex disposed on the axis of rotation.   
   
   
       9 . The vacuum side channel compressor according to  claim 8 , wherein the rotor is supported on a rotor shaft supported by an upper bearing and a lower bearing, the imaginary apex being disposed adjacent the upper bearing. 
   
   
       10 . The vacuum side channel compressor according to  claim 8 , wherein the plurality of side channels decrease in cross section from a largest outmost side channel connected with an inlet to a smalles innermost side channel connected to an outlet.