US2008136012A1PendingUtilityA1
Imagine sensor package and forming method of the same
Est. expiryDec 8, 2026(~0.4 yrs left)· nominal 20-yr term from priority
H10F 39/804H10F 39/12
55
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Claims
Abstract
An image sensor package comprises a substrate, a chip mounted over the substrate, A molding material is formed surrounding the chip to expose a micron lens area, wherein the molding material includes via structure passing there through. A protection layer is formed on the micro lens area to prevent the micro lens. A redistributed conductive layer is formed over the molding material to connect to a pad of the chip. Metal pads are formed on via structure as connecting points with PCB. A cover layer is formed over the substrate to isolate the metal pads.
Claims
exact text as granted — not AI-modified1 . A structure of image sensor package, comprising:
a substrate; a chip mounted over said substrate; a molding material formed surrounding said chip to expose a micron lens area, wherein said molding material includes via structure passing there through; a protection layer formed on said micro lens area to prevent said micro lens; a redistributed conductive layer formed over said molding material to connect to a pad of said chip; metal pads formed on said via structure; and a cover layer formed over said substrate to isolate said metal pads.
2 . The structure in claim 1 , wherein the material of said substrate includes metal, Alloy42 (42% Ni-58% Fe), Kovar (29% Ni-17% Co-54% Fe), glass, ceramic, silicon or PCB.
3 . The structure in claim 1 , wherein said chip includes CMOS image sensor die.
4 . The structure in claim 1 , wherein said chip includes CCD image sensor die.
5 . The structure in claim 1 , wherein the material of said molding layer includes silicone rubber, resin, epoxy.
6 . The structure in claim 1 , wherein material of said protection layer includes SiO, Al 2 O 3 , Fluoropolymer.
7 . The structure in claim 1 , wherein material of said redistributed conductive layer includes Cu/Au, Cu/Ni/Au alloy.
8 . The structure in claim 1 , wherein the material of said via structure includes Ti/Cu, or Ti/W/Cu alloy.
9 . The structure in claim 1 , wherein the material of said cover layer includes epoxy, resin or silicone base.
10 . The structure in claim 1 , further comprising BOA (Ball Grid Array) package solder balls formed on the lower surface of said substrate.
11 . The structure in claim 1 , wherein said metal pads as LGA (Lane Grid Array) package pads formed on the lower surface of said substrate and peripheral of said LGA package.
12 . A method of making an image sensor package, comprising:
providing a chip with a protection layer formed on a micro lens; filling a molding material surrounding said chip; providing a substrate mounting on said chip; forming a first dielectric layer over said molding material and said chip, said first dielectric layer having a first opening and a second opening exposing a micro lens area formed therein; removing partial of said first dielectric layer and said molding material to form a third opening; forming a redistributed conductive layer over said first dielectric layer to fill into said first opening to connect pad of said chip; forming a via structure to fill into said third opening; forming a second dielectric layer over said first dielectric layer and said redistributed conductive layer, said second dielectric layer having a fourth opening exposing said micro lens area; forming metal pads on said via structure; forming a cover layer over said substrate.
13 . The method claim 12 , wherein said first opening and said second opening is formed by employed a lithography process and an etching process.
14 . The method claim 12 , wherein said third opening is formed by employed a lithography process and an etching process.
15 . The method claim 12 , wherein said third opening is formed by employed a laser drilling process.
16 . The method claim 12 , wherein said redistributed conductive layer is formed by employed an electro-plating process.
17 . The method claim 12 , wherein said via structure is formed by employed an electro-plating process.
18 . The method claim 12 , wherein said fourth opening is formed by employed a lithography process and an etching process.
19 . The method claim 12 , further comprising a step of performing a half etching process of said substrate.Cited by (0)
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