Stage apparatus and vision measuring apparatus

Abstract

A stage apparatus ( 100 ) includes a stage glass ( 210 ) having on an upper surface a stage surface ( 211 ) of a substantially flat plane on which a predetermined workpiece (W) is set, a plane light emitter ( 220 ) with a flat plane, which is provided to substantially all over a lower surface of the stage glass ( 210 ) and illuminates the workpiece (W) with contour illumination through the stage glass ( 210 ), and a supporting section ( 300 ), which supports at plurality of points on a lower face side of the plane light emitter ( 220 ) and adjusts the flatness of the stage surface ( 211 ) by adjusting the height at a plurality of supporting points.

1 . A stage apparatus, comprising:
 a light transmittance plate having on an upper surface a stage surface of a substantially flat plane on which a predetermined workpiece is set;   a plane light emitter having a flat plane provided to substantially all over a lower surface of the light transmittance plate to illuminate the workpiece with contour illumination through the light transmittance plate; and   a base plate having a predetermined rigidity provided on an opposite side to the light transmittance plate interposing the plane light emitter.   
   
   
       2 . The stage apparatus according to  claim 1 , wherein the plane light emitter is divided into a plurality of parts and light emission is controlled at each of the parts independently. 
   
   
       3 . The stage apparatus according to  claim 1 , further comprising a light reflection plate provided on an opposite side to the light transmittance plate interposing the plane light emitter. 
   
   
       4 . A vision measuring apparatus, comprising:
 a stage apparatus;   an imaging device for imaging a workpiece set on the stage surface of the stage apparatus;   a movement mechanism for moving the workpiece and the imaging device in three-dimensional directions; and   an analyzing unit that analyzes a contour or dimensions of the workpiece based on image data taken by the imaging device,   the stage apparatus including:   a light transmittance plate having on an upper surface a stage surface of a substantially flat plane on which a predetermined workpiece is set;   a plane light emitter having a flat plane provided to substantially all over a lower surface of the light transmittance plate to illuminate the workpiece with contour illumination through the light transmittance plate; and   a base plate having a predetermined rigidity provided on an opposite side to the light transmittance plate interposing the plane light emitter.