Methods and systems involving electrically reprogrammable fuses
Abstract
An electrically reprogrammable fuse comprising an interconnect disposed in a dielectric material, a sensing wire disposed at a first end of the interconnect, a first programming wire disposed at a second end of the interconnect, and a second programming wire disposed at a second end of the interconnect, wherein the fuse is operative to form a surface void at the interface between the interconnect and the sensing wire when a first directional electron current is applied from the first programming wire through the interconnect to the second programming wire, and wherein, the fuse is further operative to heal the surface void between the interconnect and the sensing wire when a second directional electron current is applied from the second programming wire through the interconnect to the first programming wire.
Claims
exact text as granted — not AI-modified1 . An electrically reprogrammable fuse comprising:
an interconnect disposed in a dielectric material; a sensing wire disposed at a first end of the interconnect; a first programming wire disposed at the first end of the interconnect including a reservoir portion operative to receive displaced atoms and release stored atoms during electromigration; a second programming wire disposed at a second end of the interconnect, wherein the fuse is operative to form a surface void between the interconnect and the sensing wire when a first directional electron current is applied from the first programming wire through the interconnect to the second programming wire, and wherein, the fuse is further operative to heal the surface void between the interconnect and the sensing wire when a second directional electron current is applied from the second programming wire through the interconnect to the first programming wire; and a cavity formed between an upper portion of the interconnect and the dielectric material, wherein the cavity is configured to accelerate electromigration effects of the interconnect material during programming and reprogramming thereof.
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