Apparatus and method for limiting over travel in a probe card assembly

Abstract

Methods and apparatuses for testing semiconductor devices are disclosed. Over travel stops limit over travel of a device to be tested with respect to probes of a probe card assembly. Feedback control techniques are employed to control relative movement of the device and the probe card assembly. A probe card assembly includes flexible base for absorbing excessive over travel of the device to be tested with respect to the probe card assembly.

1 - 28 . (canceled) 
   
   
       29 : A method of controlling relative movement between an electronic device to be tested and a probe card assembly, said method comprising:
 effecting relative movement of said device and said probe card assembly;   detecting a desired amount of over travel between said wafer and said probe card assembly; and   upon detecting said desired amount of over travel, stopping said relative movement of said device and said probe card assembly.   
   
   
       30 : The method of  claim 29 , wherein said detecting said desired amount of over travel comprises detecting contact between a stop structure on said probe card assembly and said device. 
   
   
       31 : The method of  claim 29 , wherein said detecting said desired amount of over travel comprises detecting contact between a plurality of stop structures on said probe card assembly and said device. 
   
   
       32 : A media for storing machine-executable instructions for causing a controller to perform a method of controlling relative movement of a device to be tested and a probe card assembly, said method comprising:
 generating a control signal to effect relative movement of said device and said probe card assembly;   receiving an input signal indicating completion of a desired amount of over travel between said wafer and said probe card assembly; and   in response to said input signal, generating a control signal to stop said relative movement of said device and said probe card assembly.   
   
   
       33 : A method of controlling relative movement between an electronic device to be tested and a probe card assembly, said method comprising:
 effecting relative movement of said device and said probe card assembly;   determining a force of said device against said probe card assembly; and   stopping said movement when said force exceeds a maximum force.   
   
   
       34 : The method of  claim 33  further comprising. adjusting a speed of said movement in accordance with said force. 
   
   
       35 : The method of  claim 34 , wherein said adjusting a speed of said movement in accordance with said force comprises decreasing said speed as said force increases. 
   
   
       36 : A media for storing machine-executable instructions for causing a controller to perform a method of controlling relative movement of a device to be tested and a probe card assembly, said method comprising:
 generating a control signal to effect relative movement of said device and said probe card assembly;   receiving an input signal corresponding to a force of said device against said probe card assembly; and   generating a control signal to stop said movement when said force exceeds a maximum force.   
   
   
       37 : The media of  36 , wherein said method further comprises generating a control signal to adjust a speed of said movement in accordance with said force.