Low profile clamp for use with apparatus for thermal control in the analysis of electronic devices

Abstract

A heat spreader comprising a sheet of transparent diamond with an aperture therein that accommodates a solid-immersion lens (SIL). The heat spreader may be mounted within a clamp which allows the heat spreader to move freely across the Device Under Test (DUT) whilst maintaining a very high degree of planarity and contact between the diamond and the silicon substrate of the DUT. The DUT is secured to its electrical interface with a low profile clamp, the DUT may be held within the clamp by a mechanism that applies a pressure to the sides of the DUT package.

1 . A clamp for use in testing an electrical device comprising:
 a frame having a first surface and a second surface parallel to the first surface, and an aperture formed between the first surface and the second surface for housing a device under test;   a first jaw and a second jaw;   a first spring positioned to bias the first jaw in a first direction towards the aperture for housing the device under test; and   a second spring positioned to bias the second jaw in a second direction towards the aperture for housing the device under test;   wherein the first direction is perpendicular to and coplanar with the second direction and parallel to the first and second surfaces.   
   
   
       2 . The clamp of  claim 1  wherein no part of the first or second jaw, or the first or second spring, extends above the first surface of the frame. 
   
   
       3 . The clamp of  claim 1  further comprising a set screw for adjusting the spring force of the first spring. 
   
   
       4 . The clamp of  claim 1  wherein the first spring includes at least one limit post for limiting the spring force of the first spring. 
   
   
       5 . The clamp of  claim 1  further comprising at least two protrusions provided on the first surface of the frame. 
   
   
       6 . The clamp of  claim 1  wherein any surfaces of the jaws and frame that face the aperture through the frame have been treated with a finish to increase the coefficient of friction. 
   
   
       7 . The clamp of  claim 2  further comprising a set screw for adjusting the spring force of the first spring. 
   
   
       8 . The clamp of  claim 2  wherein the first spring includes at least one limit post for limiting the spring force of the first spring. 
   
   
       9 . The clamp of  claim 2  further comprising at least two protrusions provided on the first surface of the frame. 
   
   
       10 . The clamp of  claim 2  wherein any surfaces of the jaws and frame that face the aperture through the frame have been treated with a finish to increase the coefficient of friction. 
   
   
       11 . The clamp of  claim 3  wherein the first spring includes at least one limit post for limiting the spring force of the first spring. 
   
   
       12 . The clamp of  claim 3  further comprising at least two protrusions provided on the first surface of the frame. 
   
   
       13 . The clamp of  claim 3  wherein any surfaces of the jaws and frame that face the aperture through the frame have been treated with a finish to increase the coefficient of friction. 
   
   
       14 . The clamp of  claim 4  further comprising at least two protrusions provided on the first surface of the frame. 
   
   
       15 . The clamp of  claim 4  wherein any surfaces of the jaws and frame that face the aperture through the frame have been treated with a finish to increase the coefficient of friction. 
   
   
       16 . The clamp of  claim 5  wherein any surfaces of the jaws and frame that face the aperture through the frame have been treated with a finish to increase the coefficient of friction.