Film-forming composition for imprinting, method of manufacturing structure, and structure

Abstract

Provided are a film-forming composition for imprinting that enables a structure to be obtained after coating the composition on a substrate and pressing a mold thereto with low compression pressure, a method of manufacturing a structure using the film-forming composition for imprinting, and a structure obtained thereby. The film-forming composition for imprinting according to the present invention contains a resin and an organic solvent, in which the organic solvent includes a particular solvent having a boiling point of 100 to 200° C. at ambient pressure. When the structure is manufactured, the film-forming composition for imprinting according to the present invention is coated on a substrate to form a resin layer, and after a mold is pressed against the resin layer, the mold is released from the resin layer.

1 . A film-forming composition for imprinting, for use in forming a structure by coating on a substrate, and pressing a mold thereto,
 the film-forming composition for imprinting comprising a resin and an organic solvent,   wherein the organic solvent comprises a particular solvent having a boiling point of 100 to 200° C. at ambient pressure.   
     
     
         2 . The film-forming composition for imprinting according to  claim 1  wherein the proportion of the particular solvent in the entire organic solvent is no less than 30% by mass. 
     
     
         3 . The film-forming composition for imprinting according to  claim 1  wherein the resin is a siloxane resin. 
     
     
         4 . The film-forming composition for imprinting according to  claim 3  wherein the siloxane resin comprises a low-molecular weight siloxane resin having a mass-average molecular weight of 300 to 5,000. 
     
     
         5 . The film-forming composition for imprinting according to  claim 4  wherein the low-molecular weight siloxane resin has a mass-average molecular weight of 300 to 3,000. 
     
     
         6 . The film-forming composition for imprinting according to  claim 4  wherein the proportion of the low-molecular weight siloxane resin in the entire siloxane resin is no less than 30% by mass. 
     
     
         7 . A method of manufacturing a structure comprising the steps of: coating the film-forming composition for imprinting according to  claim 1  on a substrate to form a resin layer;
 pressing a mold against the resin layer; and   releasing the mold from the resin layer.   
     
     
         8 . The method of manufacturing a structure according to  claim 7  wherein the resin layer is hardened in a state where the mold is pressed against the resin layer. 
     
     
         9 . A structure obtained by the method of manufacturing a structure according to  claim 7 .