Chromatography detector

Abstract

A chromatography detector 11 includes a base substrate having a main surface 12 a and a column flow path 15 formed on the main surface 12 a , and a substrate block 13 and 14 , which has a detection space 18 communicating with an outlet of the column flow path 15 and is stacked on the main surface 12 a of the base substrate 12 so as to close a top surface of the column flow path 15.

1 . A chromatography detector comprising:
 a base substrate having a main surface and a column flow path formed on the main surface; and   a substrate block stacked on the main surface of the base substrate so as to close a top surface of the column flow path,   wherein the substrate block receives a detection module and has a detection space communicating with an outlet of the column flow path.   
   
   
       2 . The chromatography detector of  claim 1 , wherein the column flow path includes a groove and an obstacle disposed within the groove. 
   
   
       3 . The chromatography detector of  claim 2 , wherein the column flow path is formed by a semiconductor process. 
   
   
       4 . The chromatography detector of  claim 2 , wherein the obstacle is a plurality of pillars protruding from a wall surface of the groove. 
   
   
       5 . The chromatography detector of  claim 2 , wherein the obstacle is a plurality of carbon nanotubes protruding from a wall surface of the groove. 
   
   
       6 . The chromatography detector of  claim 1 , wherein the substrate block includes:
 a detection substrate having the detection space; and   a connection substrate, which is disposed between the base substrate and the detection substrate and has a connection flow path for connecting the outlet of the column flow path with an inlet of the detection space.   
   
   
       7 . The chromatography detector of  claim 6 , wherein the base substrate and the detection substrate are made of silicon,
 the connection substrate is made of glass containing movable ions, and   at least one of the base substrate and the connection substrate, and the detection substrate and the connection substrate is bonded by an anodic bonding.   
   
   
       8 . The chromatography detector of  claim 1 , further comprising:
 a detection module, which has a detection flow path where a mobile phase passes through and is detachably held in the detection space.   
   
   
       9 . The chromatography detector of  claim 8 , wherein the detection module measures absorbance or electrical conductivity of the mobile phase passing through the detection flow path. 
   
   
       10 . The chromatography detector of  claim 8 , wherein wall surfaces of the substrate block and sidewalls of the detection module surrounding the detection space are inclined at predetermined angles with respect to an entering direction of the detection module, respectively.