US2010031693A1PendingUtilityA1

Refridgerating machine

49
Assignee: ULVAC INCPriority: Nov 30, 2006Filed: Nov 29, 2007Published: Feb 11, 2010
Est. expiryNov 30, 2026(~0.4 yrs left)· nominal 20-yr term from priority
F25D 19/006F25B 9/14F25D 2400/02F25B 2400/17F25B 9/00
49
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Claims

Abstract

A refrigerating machine including: a cooling stage that cools a target object; a He condensation section onto which said object is mounted; a reservoir that communicates with said He condensation section, and is filled with He gas; and a heat transfer buffer member that is arranged between said cooling stage and said He condensation section, and is composed of a material having a thermal conductivity lower than that of said He condensation section.

Claims

exact text as granted — not AI-modified
1 . A refrigerating machine comprising:
 a cooling stage that cools a target object;   a He condensation section onto which said object is mounted;   a reservoir that communicates with said He condensation section, and is filled with He gas; and   a heat transfer buffer member that is arranged between said cooling stage and said He condensation section, and is composed of a material having a thermal conductivity lower than that of said He condensation section.   
   
   
       2 . The refrigerating machine according to  claim 1 , wherein said He condensation section is composed of a material with a thermal conductivity of 200 W/(m·K) or more at temperatures near 4 K. 
   
   
       3 . The refrigerating machine according to  claim 1 , wherein said heat transfer buffer member is composed of a material with a thermal conductivity of less than 100 W/(m·K) at temperatures near 4 K. 
   
   
       4 . The refrigerating machine according to  claim 1 , wherein a volume capacity of said He condensation section is 10 cc or more and 100 cc or less. 
   
   
       5 . The refrigerating machine according to  claim 1 , wherein a volume capacity of said reservoir is 5 to 100 times the volume capacity of said He condensation section. 
   
   
       6 . The refrigerating machine according to  claim 1 , wherein a pressure of said He gas filled in said reservoir is 0.1 MPa or more and 1.0 MPa or less at room temperature. 
   
   
       7 . The refrigerating machine according to  claim 1 , wherein a fin is vertically installed on an inner surface of said He condensation section. 
   
   
       8 . The refrigerating machine according to  claim 1 , wherein a porous structure is installed on an inner surface of said He condensation section. 
   
   
       9 . The refrigerating machine according to  claim 1 , wherein corrugations are formed on a contact face between said heat transfer buffer member and said cooling stage or said He condensation section. 
   
   
       10 . The refrigerating machine according to  claim 1 , further comprising:
 a temperature sensor and a heater that are installed in said He condensation section; and   a control section that drives said heater based on measurement results of said temperature sensor.

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