Polishing apparatus

Abstract

A polishing apparatus includes a cyclic mechanism moving cyclically in a certain direction, a holder moving cyclically by the cyclic mechanism in a direction parallel to an object to be polished, a plurality of polishing pins held on the holder, a magnet member including a first part which is exposed on a front face side of the polishing pin and a second part which is not exposed on the front face side of the polishing pin, a part of the second part being covered with a non-magnetic material, and a polishing member held on the polishing pin by magnetic force of the magnet member and polishing a tip of the object to be polished by the cyclic motion of the cyclic mechanism, wherein a contact area of the polishing member and the polishing pin includes a contact area of the magnet member and the polishing member.

1 . A polishing apparatus comprising:
 a cyclic mechanism moving cyclically in a certain direction;   a holder moving cyclically by the cyclic mechanism;   a plurality of polishing pins held on the holder;   a magnet member including a first part which is exposed on a front face side of a polishing pin of said plurality of polishing pins and a second part which is not exposed on the front face side of the polishing pin, a part of the second part being covered with a non-magnetic material; and   a polishing member held on the polishing pin by magnetic force of the magnet member,   wherein a contact area of the polishing member and the polishing pin includes a contact area of the magnet member and the polishing member.   
   
   
       2 . The polishing apparatus according to  claim 1 , wherein the polishing pin includes an engaging hole with which a portion of the magnet member is engaged. 
   
   
       3 . A polishing apparatus comprising:
 a cyclic mechanism moving cyclically in a certain direction;   a holder moving cyclically by the cyclic mechanism;   a plurality of polishing pins held on the holder;   a magnet member including a part exposed on a front face side of a polishing pin of said plurality of polishing pins; and   a polishing member held on the polishing pin by magnetic force of the magnet member,   wherein, in the polishing pin, an engaging hole, with which a portion of the magnet member is engaged, is formed and a non-magnetic member, which forms a magnetic circuit around the magnetic member, the polishing member, and the polishing pin, is provided between an internal circumferential surface of the engaging hole and an outer circumferential surface of the magnet member.   
   
   
       4 . The polishing apparatus according to  claim 3 ,
 wherein the non-magnetic member comprises a sleeve member provided between the internal circumferential surface of the engaging hole and the outer circumferential surface of the magnet.   
   
   
       5 . The polishing apparatus according to  claim 3 , wherein the non-magnetic member comprises a hardening adhesive which is filled between the internal circumferential surface of the engaging hole and the outer circumferential surface of the magnet member. 
   
   
       6 . The polishing apparatus according to  claim 3 , wherein said non-magnetic member comprises a gap forming the magnetic circuit around the magnet member, the polishing member, and the polishing pin and is formed between the internal circumferential surface of the engaging hole and the outer circumferential surface of the magnet member. 
   
   
       7 . The polishing apparatus according to  claim 1 , further comprising:
 a suppressing member of the polishing pin which suppresses the polishing member from moving in the cyclic direction.   
   
   
       8 . The polishing apparatus according to  claim 1 , further comprising:
 an elastic member provided in a direction of the cyclic motion of the polishing pin and capable of moving the polishing pin relative to the holder by elastic force.   
   
   
       9 . A polishing apparatus comprising:
 a cyclic mechanism moving cyclically in a certain direction;   a holder moving cyclically by the cyclic mechanism in a direction parallel to an object to be polished;   a plurality of polishing pins held on the holder;   a magnet member including a part exposed on a front face side of a polishing pin of said plurality of polishing pins;   a polishing member held on the polishing pin by magnetic force of the magnetic member;   an engaging hole which is provided substantially at a center of a head member forming the polishing pin and fixes the magnet member in an engaging manner; and   a non-magnetic material which is provided between an inner circumferential surface of the engaging hole and an outer circumferential surface of the magnet member and forming a magnetic circuit around the magnet member, the polishing member, and the polishing pin,   wherein the magnet member engages the polishing member with the polishing pin.   
   
   
       10 . The polishing apparatus according to  claim 9 , wherein a dimension of a front face of the magnet member exposed on a part of the polishing pin is smaller than a dimension of a rear face of the polishing member.