Monolithic linear polishing sheet

Abstract

A chemical mechanical polishing article can be a single contiguous layer having a polishing surface, the layer being an elongated substantially rectangular sheet having a width and a length at least four times greater than the width. Forming a polishing article can include depositing a liquid precursor on a moving belt, at least partially curing the liquid precursor while on the moving belt to form a polishing layer, and detaching the polishing layer from the belt.

1 . A chemical mechanical polishing article, consisting of:
 a single contiguous layer having a polishing surface, the layer being an elongated substantially rectangular sheet having a width and a length at least four times greater than the width.   
     
     
         2 . The article of  claim 1 , wherein the layer comprises polyurethane. 
     
     
         3 . The article of  claim 2 , wherein the layer comprises a porous polyurethane. 
     
     
         4 . The article of  claim 1 , wherein the layer has a thickness between about 30 and 50 mils. 
     
     
         5 . The article of  claim 1 , wherein the polishing surface includes a plurality of grooves extending partially but not entirely through the polishing pad. 
     
     
         6 . The article of  claim 5 , wherein the grooves have a depth between about 15 and 30 mils. 
     
     
         7 . The article of  claim 1 , wherein at least a portion of the layer is wound in a roll. 
     
     
         8 . The article of  claim 1 , wherein the layer has a length between about twenty and thirty feet. 
     
     
         9 . The article of  claim 1 , wherein the layer has a width between about two and four feet. 
     
     
         10 . A chemical mechanical polishing article, consisting of:
 first and second sheet portions, each sheet portion consisting of a single contiguous layer having a polishing surface, each sheet portion being an elongated substantially rectangular sheet having a width and a length at least four times greater than the width; and   a window extending the length of and connecting the first and second sheet portions.   
     
     
         11 . A chemical mechanical polishing assembly, comprising:
 a feed roller;   a take-up roller; and   a polishing sheet having a first end wound around the feed roller and a second end wound around the take-up roller, the polishing sheet consisting of single contiguous layer having a polishing surface, the layer being an elongated substantially rectangular sheet having a width and a length at least four times greater than the width.   
     
     
         12 . A method of forming a polishing article, comprising:
 depositing a liquid precursor on a moving belt;   at least partially curing the liquid precursor while on the moving belt to form a polishing layer; and   detaching the polishing layer from the belt.   
     
     
         13 . The method of  claim 12 , wherein depositing the liquid precursor includes depositing the liquid precursor onto a carrier sheet supported on the belt. 
     
     
         14 . The method of  claim 13 , wherein the carrier sheet comprises a thin polyethylene terephthalate polyester film. 
     
     
         15 . The method of  claim 13 , further comprising removing the polishing layer from the carrier sheet. 
     
     
         16 . The method of  claim 15 , further comprising grinding top and bottom surfaces of the polishing layer. 
     
     
         17 . The method of  claim 12 , wherein at least partially curing the liquid precursor includes heating. 
     
     
         18 . The method of  claim 12 , further comprising fully curing the polishing sheet after the polishing sheet is detached from the belt. 
     
     
         19 . The method of  claim 12 , further comprising compressing the polishing sheet. 
     
     
         20 . The method of  claim 15 , wherein compressing includes passing the polishing sheet between pinch rollers. 
     
     
         21 . The method of  claim 12 , further comprising forming grooves in the polishing sheet. 
     
     
         22 . The method of  claim 12 , further comprising trimming edges of the polishing sheet.