US2010149671A1PendingUtilityA1

High positioning reproducible low torque mirror - actuator interface

48
Assignee: ZEISS CARL SMT AGPriority: May 4, 2004Filed: Feb 25, 2010Published: Jun 17, 2010
Est. expiryMay 4, 2024(expired)· nominal 20-yr term from priority
G03F 7/70825G02B 7/182
48
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Claims

Abstract

The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator.

Claims

exact text as granted — not AI-modified
1 . A mirror mount for providing an interface between a mirror and another component, the mirror mount comprising:
 a body having a first end and an opposing second end, the body including a plurality of flexible elements around a perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane, the body being open at the first end to allow flexing of the flexible elements.   
     
     
         2 .- 29 . (canceled)

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