Stamper for transferring fine pattern and method for manufacturing thereof

Abstract

An object of the present invention is to provide a stamper for transferring fine pattern and a method for manufacturing the stamper, the stamper has a fine structure layer to improve a continuous transferring property of the resinous stamper, and to allow accurate and continuous transferring. In order to achieve the above object, the present invention provides a stamper for transferring fine pattern, including: a fine structure layer on a supporting substrate, in which the fine structure layer is a polymer of a resinous compound whose principal component is silsesquioxane derivative having a plurality of polymerizable functional groups.

1 . A stamper for transferring a fine pattern, comprising:
 a fine structure layer on a supporting substrate,   wherein the fine structure layer is a polymer of a resinous compound whose principal component is silsesquioxane derivative having a plurality of polymerizable functional groups.   
   
   
       2 . The stamper according to  claim 1 , wherein the silsesquioxane derivative content in the resinous compound is 80 weight percent or more. 
   
   
       3 . The stamper according to  claim 1 , wherein the silsesquioxane derivative has three or more polymerizable functional groups. 
   
   
       4 . The stamper according to  claim 1 , wherein the supporting substrate and the fine structure layer are light-transmissive. 
   
   
       5 . The stamper according to  claim 1 , wherein the polymerizable functional group of the silsesquioxane derivative is at least one selected from a vinyl group, an epoxy group, an oxetanyl group, a vinyl ether group, and a (metha)acrylate group. 
   
   
       6 . The stamper according to  claim 1 , wherein the resinous compound further includes a photo-curing polymerization initiator. 
   
   
       7 . The stamper according to  claim 6 , wherein the photo-curing polymerization initiator is a cationic polymerizable catalyst which initiates curing by ultraviolet light. 
   
   
       8 . The stamper according to  claim 1 , wherein all of the components of the resinous compound, except the photo-curing polymerization initiator, are resins having the polymerizable functional groups. 
   
   
       9 . The stamper according to  claim 1 , wherein the supporting substrate is composed of two or more kinds of layers whose elastic coefficients differ one another. 
   
   
       10 . The stamper according to  claim 9 , wherein the supporting substrate includes a first hard layer, a first soft layer, a second hard layer, and a second soft layer in order of the above description, elastic coefficients of the first soft layer and the second soft layer are less than those of the first hard layer and the second hard layer, and the fine structure layer is formed on a surface of the second soft layer. 
   
   
       11 . The stamper according to  claim 9 , wherein the supporting substrate includes the first hard layer, a soft layer, and the second hard layer in order of the above description, and an elastic coefficient of the soft layer  1   e  is less than those of the first hard layer and the second hard layer, the fine structure layer is formed on a surface of the second hard layer. 
   
   
       12 . A stamper for transferring a fine pattern on a curable resinous material provided on a transferred substrate, comprising:
 a fine structure layer on a supporting substrate,   wherein the fine structure layer is a polymer of a resinous compound whose principal component is silsesquioxane derivative having a plurality of polymerizable functional groups, and   a curing mechanism of the silsesquioxane derivative differs from that of the curable resinous material.   
   
   
       13 . The stamper according to  claim 12 , wherein the silsesquioxane derivative content in the resinous compound is 80 weight percent or more. 
   
   
       14 . The stamper according to  claim 12 , wherein the silsesquioxane derivative has three or more polymerizable functional groups. 
   
   
       15 . The stamper according to  claim 12 , wherein the supporting substrate and the fine structure layer are light-transmissive. 
   
   
       16 . The stamper according to  claim 12 , wherein the polymerizable functional group of the silsesquioxane derivative is at least one selected from a vinyl group, an epoxy group, an oxetanyl group, a vinyl ether group, and a (metha)acrylate group. 
   
   
       17 . The stamper according to  claim 12 , wherein the resinous compound further includes a photo-curing polymerization initiator. 
   
   
       18 . The stamper according to  claim 17 , wherein the photo-curing polymerization initiator is a cationic polymerizable catalyst which initiates curing by ultraviolet light. 
   
   
       19 . The stamper according to  claim 12 , wherein all of the components of the resinous compound, except the photo-curing polymerization initiator, are resins having the polymerizable functional groups. 
   
   
       20 . The stamper according to  claim 12 , wherein the supporting substrate is composed of two or more kinds of layers whose elastic coefficients differ one another. 
   
   
       21 . The stamper according to  claim 20 , wherein the supporting substrate includes a first hard layer, a first soft layer, a second hard layer, and a second soft layer in order of the above description, elastic coefficients of the first soft layer and the second soft layer are less than those of the first hard layer and the second hard layer, and the fine structure layer is formed on a surface of the second soft layer. 
   
   
       22 . The stamper according to  claim 20 , wherein the supporting substrate includes the first hard layer, a soft layer, and the second hard layer in order of the above description, and an elastic coefficient of the soft layer  1   e  is less than those of the first hard layer and the second hard layer, the fine structure layer is formed on a surface of the second hard layer. 
   
   
       23 . A method for manufacturing a stamper for transferring fine pattern, comprising the steps of:
 applying a resinous compound whose principal component is silsesquioxane derivative having a plurality of polymerizable functional groups on a supporting substrate;   pressing a master mold on which a fine pattern is formed against the resinous compound applied on the supporting substrate;   curing the resinous compound with the master mold being pressed; and   peeling the master mold from the cured resinous compound.