Microscope

Abstract

The present invention relates to a microscope of which visibility, controllability and operability can be improved. In the microscope, an optical path and optical path of an image forming system are set so as to be perpendicular to each other when viewed from the top. In other words, in this microscope, there exists an ocular optical system that guides light, which propagates the optical path to optical path of the image forming system, to a user. The optical path is formed in a direction perpendicular to a direction of the light from a sample emitted from the ocular optical system to the user. The present invention can be applied to an inverted microscope.

1 . A microscope, comprising an image forming optical system that condenses light from a sample, includes an ocular optical system, and guides the light from said sample, wherein
 said image fanning optical system has an objective lens for condensing light from said sample and a deflecting element for deflecting the light condensed by said objective lens, and   said image forming optical system includes an optical axis of said objective lens, and includes at least a first optical path that is formed in parallel with the optical axis of said objective lens, and   a second optical path that is formed by deflecting light, which propagates said first optical path, by said deflecting element, and is formed in a direction different from said first optical path, and   said second optical path is formed approximately perpendicular to an emission direction of the light of said ocular optical system from said sample when viewed from the top.   
     
     
         2 . The microscope according to  claim 1 , further comprising an illumination optical system that guides illumination light to said sample via said objective lines, and wherein
 an optical path of said illumination optical system is set such that a part of the optical path of said illumination optical system is parallel with said second optical path, and a part of the optical path of said illumination optical system and at least a part of said second optical path overlap when viewed from a predetermined direction, that is perpendicular to a part of the optical path of said illumination optical system and said optical system respectively.   
     
     
         3 . The microscope according to  claim 1 , wherein
 a part of an optical path at the sample side of said first optical path of said image forming optical system and a part of an optical path at the sample side of the optical path of said illumination optical system are shared,   said objective lens is a part of said illumination optical system, and   said objective lens is disposed below said sample.   
     
     
         4 . The microscope according to  claim 1 , wherein said image forming optical system forms an image of said sample on said second optical path, and a reticle can be disposed at a position on said second optical path where the image of said sample is formed. 
     
     
         5 . The microscope according to Claim  1 , wherein
 a stop to limit luminous flux of said illumination optical system is provided on the optical path of said illumination optical system that is parallel with said second optical path,   a relay optical system for forming the image of said sample on said second optical path is provided in said image forming optical system, and   a reticle can be disposed at a position where the image of said sample is formed.   
     
     
         6 . A microscope, comprising:
 an illumination optical system that guides luminous flux from a light source for illumination, and illuminates a sample; and   an image fanning optical system that guides light from said sample to an ocular so that an image of said sample can be observed via an objective lens, wherein   said illumination optical system has, at least on a part thereof, an optical path that guides the luminous flux from said light source in lateral direction when a longitudinal direction is a direction parallel with the optical path of the ocular optical system when said microscope is viewed from the top, and   a stop element for limiting the luminous flux from said light source is disposed on said optical path in the lateral direction.   
     
     
         7 . The microscope according to  claim 6 , wherein
 the optical path of said illumination optical system in an area closest to said light source is approximately parallel with the optical path of said ocular optical system when said microscope is viewed from the top, and   said illumination optical system comprises a deflecting element that deflects the luminous flux from said light source toward said optical path in the lateral direction.   
     
     
         8 . The microscope according to  claim 7 , wherein
 said illumination optical system further comprises a relay optical system that forms a light source image by condensing the luminous flux from said light source, and said deflecting element deflects the luminous flux from said relay optical system toward said stop element.   
     
     
         9 . The microscope according to  claim 7 , wherein
 said stop element includes a field stop,   said illumination optical system further comprises a field lens group that is disposed at the objective lens side of said field stop so that a front side focal plane overlaps with the plane of said field stop, in order to project an image of said field stop onto a sample plane, and   when f 1  denotes a focal length of said field lens group, and L 1  denotes a distance along the optical axis between a plane of said field lens group most distant from said field stop and the plane of said field stop, the focal length f 1  and distance L 1  satisfy the following expression:
   1 <L 1 /f 1<1.2. 
   
     
     
         10 . The microscope according to  claim 8 , wherein
 said stop element includes an aperture stop that is disposed at the sample side of said relay optical system, and   when f 2  denotes a focal length of said relay optical system, and L 2  denotes a distance along the optical axis between the plane of an optical element of said relay optical system closest to the aperture stop side and the aperture stop plane, the focal length f 2  and distance L 2  satisfy the following expression:
   0.7 <L 2 <f 2<1.0. 
   
     
     
         11 . The microscope according to  claim 6 , further comprising a luminous flux combining element which makes the optical path of said illumination optical system and said image forming optical system at the sample side a common optical path, and characterized in that the objective lens is disposed at the sample side of said luminous flux combining element.