Bonding apparatus and bonding method

Abstract

To provide a bonding apparatus capable of increasing product quality by realizing high-precision control of a pressing force applied upon mounting of an electronic component on a substrate by bonding, and to a bonding method capable of providing high-quality products stably. The bonding apparatus includes: at least a bonding head 100 for pressing an electronic component 6 against a substrate 1 to bond it to the substrate 1 ; a plurality of load detection mechanisms (e.g., load sensors 5 ) substantially equally spaced so as to face one another under a substrate stage S supporting the substrate 1 provided with the electronic component 6 ; and a pressure detection unit 20 for detecting pressing force at the bonding surface between the electronic component 6 and substrate 1 on the basis of the pressure values detected by the individual load detection mechanisms 5.

1 . A bonding method, comprising:
 pressing an electronic component against a substrate by means of a bonding head to bond the electronic component to the substrate;   detecting a pressure at a bonding surface between the electronic component and the substrate on the basis of pressure values detected by a plurality of load detection mechanisms that are substantially equally spaced so as to face one another under a substrate stage which supports the substrate arranged to face the electronic component.   
     
     
         2 . The bonding method according to  claim 1 , wherein the electronic component has a polygonal shape, and the load detection mechanisms are disposed at positions corresponding to the corners of the electronic component. 
     
     
         3 . The bonding method according to  claim 2 , wherein the electronic component has a square shape, and the load detection mechanisms are disposed at positions corresponding to the corners of the electronic component. 
     
     
         4 . The bonding method according to  claim 1 , wherein the load detection mechanisms are disposed in a matrix form. 
     
     
         5 . The bonding method according to  claim 1 , further comprising:
 adjusting a pressing force of the bonding head; and   performing feedback control on the pressing force while comparing a predetermined reference pressure value with the total of the pressure values detected by the individual load detection mechanisms.   
     
     
         6 . The bonding method according to  claim 5 , wherein in the feedback control step upper and lower thresholds for a pressing force on each of the load detection mechanisms are previously set on the basis of the pressure values detected by the individual load detection mechanisms. 
     
     
         7 . The bonding method according to  claim 5 , wherein in the feedback control step upper and lower thresholds for a pressing force on each row of the load detection mechanisms are previously set on the basis of the pressure values detected by the individual load detection mechanisms. 
     
     
         8 . The bonding method according to  claim 6 , wherein the occurrence of abnormality is detected when the pressure value detected by the load detection mechanism has exceeded the threshold. 
     
     
         9 . The bonding method according to  claim 8 , wherein the operation of the pressing step is halted. 
     
     
         10 . The bonding method according to  claim 1 , wherein traceability is ensured for the bonding status of the bonding surface between the electronic component and the substrate on the basis of the pressure values detected by the individual load detection mechanisms.