Substrate processing apparatus and producing method of semiconductor device

Abstract

Disclosed is a substrate processing apparatus, comprising a processing chamber, a holder to hold at least a plurality of product substrates, a heating member, a supplying member to alternately supply at least a first reactant and a second reactant, and a control unit, wherein the control unit executes forming thin films on the substrates by supplying the first reactant, removing a surplus of the first reactant after the first reactant has been adsorbed on the product substrates, subsequently supplying the second reactant, to cause the second reactant to react with the first reactant adsorbed on the substrates, and executes the forming the thin films in a state where a number of the product substrates is insufficient when a number of the product substrates is less than a maximum number of the product substrates which can be held by the holder.

1 . A substrate processing apparatus, comprising:
 a processing chamber;   a holding member to hold at least a plurality of product substrates in the processing chamber,   a heating member to heat the substrates,   a supplying member to alternately supply at least a first reactant and a second reactant into the processing chamber;   an exhausting port opened to the processing chamber, and   a control unit, wherein the control unit   executes a processing of forming thin films on the substrates by supplying the first reactant into the processing chamber, removing a surplus of the first reactant after the first reactant has been adsorbed on the product substrates which are held by the holding member, subsequently supplying the second reactant into the processing chamber, to cause the second reactant to react with the first reactant which has been adsorbed on the substrates, and   executes the processing of forming the thin films in a state where a number of the product substrates is insufficient when a number of the product substrates to be held by the holding member is less than a maximum number of the product substrates which can be held by the holding member.   
     
     
         2 . A substrate processing apparatus, comprising:
 a processing chamber;   a holding member to hold at least a plurality of product substrates in the processing chamber, the product substrates packed in said holding member in a longitudinal direction from a top of said processing chamber to a bottom of said processing chamber,   a heating member to heat the substrates,   a supplying member to alternately supply at least a first reactant and a second reactant into the processing chamber;   an exhausting port opened to the processing chamber, and   a control unit, wherein the control unit   executes a processing of forming thin films on the substrates by supplying the first reactant into the processing chamber, removing a surplus of the first reactant after the first reactant has been adsorbed on the product substrates which are held by the holding member, subsequently supplying the second reactant into the processing chamber, to cause the second reactant to react with the first reactant which has been adsorbed on the substrates, and   allows the product substrates to be packed at the top of said processing chamber and held on an upstream side of a gas flow of the holding member and the exhausting port side of the holding member to be a non-holding region, and executes the processing of forming the thin films on the substrates when the number of the product substrates to be held by the holding member is less than the maximum number of the product substrates which can be held by the holding member.   
     
     
         3 . A substrate processing apparatus as recited in  claim 2 , wherein
 the control unit executes the processing of forming the thin films under the same condition of the heating member as when the maximum number of product substrates are held by the holding member, when the number of the product substrates to be held by the holding member is less than the maximum number of the product substrates which can be held by the holding member.   
     
     
         4 . A producing method of a semiconductor device, comprising:
 a first step of allowing a holding member in a processing chamber to hold a plurality of product substrates, the product substrates packed in said holding member in a longitudinal direction from a top of said processing chamber to a bottom of said processing chamber,   a second step of heating the substrates,   a third step of supplying a first reactant into the processing chamber and allowing the first reactant to be adsorbed on the product substrates,   a fourth step of removing a surplus of the first reactant from inside the processing chamber,   a fifth step of supplying a second reactant into the processing chamber and allowing the second reactant to react with the first reactant which has been adsorbed on the product substrates to form thin films on the substrates, and   a sixth step of repeating at least the steps 3 to 5 for a predetermined times till the thin films having a desired thickness are formed on the product substrates, wherein   the steps 1 to 6 are carried out under conditions that allow the product substrates to be packed at the top of said processing chamber and held on an upstream side of a gas flow of the holding member and an exhausting port side of the holding member to be a non-holding region when a number of the product substrates to be held by the holding member is less than a maximum number of the product substrates which can be held by the holding member.