Unitized confinement ring arrangements and methods thereof

Abstract

An arrangement for performing pressure control in a plasma processing chamber comprising an upper electrode, a lower electrode, a unitized confinement ring arrangement wherein the upper electrode, the lower electrode and the unitized confinement ring arrangement are configured at least for surrounding a confined chamber region to facilitate plasma generation and confinement therein. The arrangement further includes at least one plunger configured for moving the unitized confinement ring arrangement in a vertical direction to adjust at least one of a first gas conductance path and a second gas conductance path to perform the pressure control, wherein the first gas conductance path is formed between the upper electrode and the unitized confinement ring arrangement and the second gas conductance path is formed between the lower electrode and the single unitized ring arrangement.

1 . An arrangement for performing pressure control in a processing chamber of a plasma processing system during processing of a substrate, said arrangement comprising:
 an upper electrode;   a lower electrode;   a unitized confinement ring arrangement, wherein said upper electrode, said lower electrode and said unitized confinement ring arrangement are configured at least for surrounding a confined chamber region, wherein said confined chamber region is capable of supporting a plasma for etching said substrate during substrate processing and said unitized confinement ring arrangement is configured for confining said plasma within said confined chamber region; and   at least one plunger configured for moving said unitized confinement ring arrangement in a vertical direction to adjust at least one of a first gas conductance path and a second gas conductance path to perform said pressure control, wherein said first gas conductance path is formed between said upper electrode and said unitized confinement ring arrangement and said second gas conductance path is formed between said lower electrode and said single unitized ring arrangement.   
     
     
         2 . The arrangement of  claim 1  wherein said second gas conductance path is formed between a bottom surface of said unitized confinement ring arrangement and a top surface of said lower electrode, wherein at least a portion of the width of said bottom surface of said unitized confinement ring arrangement overlaps said top surface of said lower electrode, wherein said pressure control within said confined chamber region is provided by moving said at least one plunger vertically to adjust the width of said second gas conductance path. 
     
     
         3 . The arrangement of  claim 1  wherein said unitized confinement ring arrangement extends from said upper electrode downward past a top surface of said lower electrode such that said second gas conductance path is formed between a left side wall of said unitized confinement ring arrangement and a right side wall of said lower electrode, wherein said pressure control within said confined chamber region is provided by moving said at least one plunger vertically to adjust the length of said second gas conductance path. 
     
     
         4 . The arrangement of  claim 1  wherein said first gas conductance path is formed between a left side wall of said unitized confinement ring arrangement and a right side wall of said upper electrode, wherein said pressure control within said confined chamber region is provided by moving said at least one plunger vertically to adjust the length of said first gas conductance path. 
     
     
         5 . The arrangement of  claim 1  wherein said first gas conductance path is formed between a first protrusion of said upper electrode and a second protrusion of said unitized confinement ring arrangement, wherein at least a portion of said second protrusion overlaps said first protrusion, wherein said pressure control within said confined chamber region is provided by moving said at least one plunger vertically to adjust the width of said first gas conductance path. 
     
     
         6 . The arrangement of  claim 1  wherein at least a portion of a right side wall of said upper electrode is at a first angle and at least a portion of a left side wall of said unitized confinement ring arrangement is at a second angle such that said first gas conductance path is formed between said upper electrode and said unitized confinement ring arrangement, wherein said pressure control within said confined chamber region is provided by moving said at least one plunger vertically to adjust the width of said first gas conductance path. 
     
     
         7 . The arrangement of  claim 1  wherein said unitized confinement ring arrangement is comprised of a single ring. 
     
     
         8 . The arrangement of  claim 1  wherein said unitized confinement ring arrangement is comprised of multiple components combined such that each component is nonmovable relative to one another. 
     
     
         9 . The arrangement of  claim 1  wherein said unitized confinement ring arrangement is made from a dielectric material. 
     
     
         10 . The arrangement of  claim 1  wherein said unitized confinement ring arrangement is made from a conductive material. 
     
     
         11 . The arrangement of  claim 1  wherein said plasma processing system is a capactively-coupled plasma processing system. 
     
     
         12 . The arrangement of  claim 1  further including an automatic feedback arrangement configured at least for monitoring and stabilizing the pressure within said confined chamber region. 
     
     
         13 . The arrangement of  claim 12  wherein said automatic feedback arrangement includes a set of sensors configured for collecting processing data about pressure volume within said confined chamber region. 
     
     
         14 . The arrangement of  claim 13  wherein said automatic feedback arrangement includes a precision vertical movement arrangement configured at least for
 receiving said processing data from said set of sensors, 
 analyzing said processing data, and 
 determining a new position for said single unitized ring arrangement. 
 
     
     
         15 . The arrangement of  claim 1  wherein said unitized confinement ring arrangement includes a set of slots, wherein each slot of said set of slots is configured for providing an additional path for exhausting gas from said confined chamber region, wherein the availability of said each slot is adjusted by moving said at least one plunger vertically. 
     
     
         16 . An arrangement for performing pressure control in a processing chamber of a plasma processing system during processing of a substrate, said arrangement comprising:
 an upper electrode;   a lower electrode;   a unitized confinement ring arrangement, wherein said upper electrode, said lower electrode and said unitized confinement ring arrangement are configured at least for surrounding a confined chamber region, wherein said confined chamber region is capable of supporting a plasma for etching said substrate during substrate processing and said unitized confinement ring arrangement is configured for confining said plasma within said confined chamber region; and   a valve configured at least for controlling pressure within said confined chamber region.   
     
     
         17 . The arrangement of  claim 16  wherein a first gas conductance path is formed between said upper electrode and said unitized confinement ring, said first gas conductance path providing a first route for exhausting gas from said confined chamber region. 
     
     
         18 . The arrangement of  claim 17  wherein a second gas conductance path is formed between said lower electrode and said unitized confinement ring, said second gas conductance path providing a second route for exhausting said gas from said confined chamber region. 
     
     
         19 . The arrangement of  claim 16  further including an automatic feedback arrangement configured at least for monitoring and stabilizing the pressure within said confined chamber region. 
     
     
         20 . The arrangement of  claim 16  wherein said unitized confinement ring arrangement is made from at least one of a dielectric material and a conductive material.