Indexing magnet assembly for rotary sputtering cathode

Abstract

A magnet assembly for a rotary cathode having a rotatable target cylinder is provided. The magnet assembly comprises a coolant tube configured to be positioned within the target cylinder, and a magnet bar configured to be positioned within the target cylinder and extending substantially parallel to the coolant tube. The magnet bar moves laterally with respect to the target cylinder in a synchronous manner with rotation of the target cylinder.

1 . A magnet assembly for a rotary cathode having a rotatable target cylinder, the magnet assembly comprising:
 a coolant tube configured to be positioned within the target cylinder; and   a magnet bar configured to be positioned within the target cylinder and extending substantially parallel to the coolant tube;   wherein the magnet bar moves laterally with respect to the target cylinder in a synchronous manner with rotation of the target cylinder.   
     
     
         2 . The magnet assembly of  claim 1 , wherein the magnet bar is slidably mounted to the coolant tube and moves independently of the coolant tube. 
     
     
         3 . The magnet assembly of  claim 2 , further comprising an indexing wheel rotatably attached to the coolant tube, and a connecting arm attached to the indexing wheel. 
     
     
         4 . The magnet assembly of  claim 3 , further comprising a first capping structure mounted at a first end of the target cylinder, and a second capping structure mounted at an opposite second end of the target cylinder. 
     
     
         5 . The magnet assembly of  claim 4 , further comprising at least one drive pin mounted on one of the first or second capping structures. 
     
     
         6 . The magnet assembly of  claim 5 , wherein the indexing wheel is partially turned when engaged by the pin during rotation of the target cylinder, causing the indexing wheel to pull or push on the connecting arm, which moves the magnet bar laterally with respect to the target cylinder. 
     
     
         7 . The magnet assembly of  claim 1 , wherein the magnet bar is rigidly mounted to the coolant tube and moves with the coolant tube. 
     
     
         8 . The magnet assembly of  claim 7 , wherein the magnet bar and coolant tube are combined in a unitary structure that moves in a lateral direction. 
     
     
         9 . The magnet assembly of  claim 7 , further comprising an indexing wheel rotatably attached to the coolant tube. 
     
     
         10 . The magnet assembly of  claim 9 , further comprising a first capping structure mounted at a first end of the target cylinder, and a second capping structure mounted at an opposite second end of the target cylinder. 
     
     
         11 . The magnet assembly of  claim 10 , further comprising at least one drive pin mounted on one of the first or second capping structures. 
     
     
         12 . The magnet assembly of  claim 11 , wherein the indexing wheel is partially turned when engaged by the drive pin during rotation of the target cylinder, causing the indexing wheel to move the coolant tube and magnet bar laterally with respect to the target cylinder. 
     
     
         13 . A rotary cathode comprising the magnet assembly according to  claim 1 . 
     
     
         14 . An indexing magnet assembly, comprising:
 a tube having a proximal end and a distal end;   a stiffening structure at least partially surrounding the tube and laterally movable with respect to the tube;   a magnet bar extending substantially parallel to the tube and spaced apart from the tube, the magnet bar laterally movable with the stiffening structure;   an indexing wheel rotatably attached to the distal end of the tube; and   a connecting arm attached to the indexing wheel;   wherein as the indexing wheel rotates, the connecting arm moves the stiffening structure and magnet bar in a lateral direction with respect to the tube in a synchronous manner.   
     
     
         15 . The indexing magnet assembly of  claim 14 , further comprising at least one support disc affixed to the tube and protruding outside of an aperture in the stiffening structure. 
     
     
         16 . The indexing magnet assembly of  claim 15 , further comprising at least one tube clamp connected to the stiffening structure and the connecting arm. 
     
     
         17 . The indexing magnet assembly of  claim 16 , wherein the tube clamp comprises:
 a support plate attached to the magnet bar; and   at least one uniformity adjustment spacer interposed between the support plate and the tube.   
     
     
         18 . A rotary cathode comprising the indexing magnet assembly according to  claim 14 . 
     
     
         19 . A magnetron sputtering apparatus comprising at least one rotary cathode including the indexing magnet assembly according to  claim 14 . 
     
     
         20 . A rotary cathode for a magnetron sputtering apparatus, the rotary cathode comprising:
 a rotatable target cylinder having an outer surface and an interior passageway, the target cylinder having a proximal end and a distal end;   an end cap affixed at the distal end of the target cylinder, the end cap having an inner surface facing the interior passageway;   a coolant tube positioned within the interior passageway from the proximal end to the distal end of the target cylinder;   a stiffening structure located within the interior passageway and laterally movable with respect to the coolant tube;   a magnet bar extending substantially parallel to the coolant tube and spaced apart from the coolant tube, the magnet bar connected to the stiffening structure and laterally movable with the stiffening structure;   an indexing wheel rotatably attached to the coolant tube; and   a connecting arm attached off center to the indexing wheel;   wherein as the target cylinder rotates, the indexing wheel is incrementally moved such that the connecting arm pushes or pulls the stiffening structure and magnet bar in a lateral direction with respect to the target cylinder.