Substrate processing apparatus

Abstract

A substrate processing apparatus which can securely show the status of recipe transition is provided. In a substrate processing apparatus including a main control unit which sends a control instruction to process a substrate, and a sub control unit which carries out control of the apparatus in accordance with the control instruction from main control unit, the main control unit has a memory unit which stores plural recipes, a display control unit which accepts an execution instruction to cause an arbitrary recipe of the plural recipes to be executed, and a display unit which displays the arbitrary recipe designated by the display control unit, on an operation screen. When an execution instruction to cause another recipe stored in the recipe storage means to be executed is received during the execution of the arbitrary recipe, the arbitrary recipe and this another recipe are displayed on the operation screen together with a factor which has generated the execution instruction to cause this another recipe to be executed.

1 . A method for displaying recipe progress comprising:
 accepting an execution instruction to cause a certain recipe of plural recipes stored in a recipe storage means to be executed; and   displaying plural recipes, including the certain recipe to be executed, from a recipe that is executed first to a recipe that is currently being executed with each factor that has generated the execution instruction to cause the plural recipes to be executed displayed between the recipes on an operation screen.   
     
     
         2 . The method according to  claim 1 , wherein the recipe storage means stores at least one of a process recipe, a sub recipe, a reset recipe, an alarm recipe, and an abort recipe. 
     
     
         3 . The method according to  claim 1 , wherein the factor includes at least one of a step command, an alarm condition, and a PM command. 
     
     
         4 . The method according to  claim 3 , wherein the step command includes at least one of RESET, END, HOLD, BUZZER, JUMP(STEP), and SUB RECIPE. 
     
     
         5 . The method according to  claim 1 , wherein when one of buttons in a portion displaying the plural recipes is pressed, step information that includes a step name corresponding to the pressed button is displayed. 
     
     
         6 . The method according to  claim 1 , wherein when one of buttons labeled step names corresponding to steps of the certain recipe to be executed or the plural recipes is pressed, recipe setting information and trouble information are further displayed. 
     
     
         7 . The method according to  claim 5 , wherein the step information is displayed in various colors depending on the status of processing. 
     
     
         8 . A substrate processing apparatus for displaying recipe progress comprising:
 a recipe storage means for storing plural recipes;   a display control means for accepting an execution instruction to cause one recipe of the plural recipes to be executed; and   a display means for displaying the recipe designated by the display control means, on an operation screen, wherein   the display control means causes recipes from a recipe that is executed first to a recipe that is currently executed, in the recipe storage means, to be displayed, and   the display means displays the recipes and displays each factor that has generated an execution instruction to cause the recipes to be executed between the recipes on the operation screen.   
     
     
         9 . The substrate processing apparatus of  claim 8 , wherein the recipe storage means stores at least one of a process recipe, a sub recipe, a reset recipe, an alarm recipe, and an abort recipe. 
     
     
         10 . The substrate processing apparatus of  claim 8 , wherein the factor includes at least one of a step command, an alarm condition, and a PM command. 
     
     
         11 . The substrate processing apparatus of  claim 10 , wherein the step command includes at least one of RESET, END, HOLD, BUZZER, JUMP(STEP), and SUB RECIPE. 
     
     
         12 . The substrate processing apparatus of  claim 8 , wherein when one of buttons in a portion displaying the plural recipes is pressed, step information which includes a step name corresponding to the pressed button is displayed. 
     
     
         13 . The substrate processing apparatus of  claim 8 , wherein when one of buttons labeled step names corresponding to steps of executed recipes is pressed, recipe setting information and trouble information are further displayed. 
     
     
         14 . The substrate processing apparatus of  claim 12 , wherein the step information is displayed in various colors depending on the status of processing. 
     
     
         15 . A substrate processing apparatus comprising:
 a recipe storage means for storing one or more recipes including plural steps;   a display control means for accepting an execution instruction to cause a step information of a recipe to be executed; and   a display means for displaying the step information of the recipe designated by the display control means, on an operation screen, wherein   when an execution instruction to cause an other recipe stored in the recipe storage means to be executed is received, during the execution of the recipe, the step information that is currently being executed, of this other recipe, and step information that is executed when the execution instruction is generated, of the recipe, are displayed on the operation screen together with a factor that has generated the execution instruction to cause the other recipe to be executed.   
     
     
         16 . A method for processing a substrate combining:
 storing one or more recipes including plural steps in a recipe storage means;   accepting an execution instruction to cause step information of a recipe to be executed; and   displaying the step information of the recipe to be executed on an operation screen, wherein   when an execution instruction to cause an other recipe stored in the recipe storage means to be executed is received, during the execution of the recipe, step information that is currently being executed, of this other recipe, and step information that is executed when the execution instruction is generated, of the recipe, are displayed on the operation screen together with a factor that has generated the execution instruction to cause the other recipe to be executed.