Inventor · disambiguated record
Akihiko Yoneda
Also filed as: YONEDA AKIHIKO
7 granted patents·4 pending applications·55 citations·filing 2004–2025
79Inventor score
Technology areasH10P
Top patents by PatentIndex Score
11 records- 0188US7494941B2Manufacturing method of semiconductor device, and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2004·Granted Feb 24, 2009·46 cites·16 claims
- 0272US8600539B2Substrate processing apparatusYONEDA AKIHIKO·Filed 2007·Granted Dec 3, 2013·6 cites·16 claims
- 0367US2025226248A1Substrate processing system, substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 0465US10295991B2Substrate processing apparatus and recording mediumHITACHI INT ELECTRIC INC·Filed 2017·Granted May 21, 2019·1 cites·12 claims
- 0560US10290516B2Substrate processing apparatus, maintenance method, and maintenance programHITACHI INT ELECTRIC INC·Filed 2013·Granted May 14, 2019·1 cites·9 claims
- 0659US7808396B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2006·Granted Oct 5, 2010·1 cites·10 claims
- 0754US2025308958A1Display method, method of manufacturing semiconductor device, recording medium, processing apparatus, processing system, and management apparatusKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 0846US2009114150A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
- 0943US2011167374A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2011·Application pending·0 cites
- 1041US10903098B2Substrate processing system and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2019·Granted Jan 26, 2021·0 cites·14 claims
- 1138US8482426B2Substrate processing apparatusIIDA TSUKASA·Filed 2010·Granted Jul 9, 2013·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →