Apparatus for treatment of samples for auger electronic spectrometer (aes) in the manufacture of integrated circuits

Abstract

An apparatus for treatment of a sample for the manufacture of integrated circuits includes a holder apparatus and a stage which is coupled to the holder apparatus. The stage is capable of holding a portion of a sample to be analyzed. The apparatus also includes a shield that is operably coupled to the stage to block a portion of the sample. The shield is capable of movement relative to the sample to block one or more portions of the sample. The shield is provided on a track member and is movable from a first spatial location to a second spatial location on the track member. The apparatus further includes an enclosure surrounding an entirety of the sample and the shield.

1 - 20 . (canceled) 
     
     
         21 . An apparatus for treatment of a sample for the manufacture of integrated circuits, the apparatus comprising:
 a holder apparatus;   a stage coupled to the holder apparatus, the stage being capable of holding a portion of a sample to be analyzed;   a shield operably coupled to the stage to block a portion of the sample, the shield being capable of movement relative to the sample to block one or more portions of the sample.   
     
     
         22 . The apparatus of  claim 21  wherein the shield is provided on a track member, the shield being movable from a first spatial location to a second spatial location on the track member. 
     
     
         23 . The apparatus of  claim 21  wherein the shield comprises an aluminum material. 
     
     
         24 . The apparatus of  claim 21  wherein the shield comprises a stainless steel material. 
     
     
         25 . The apparatus of  claim 21  further comprising an enclosure surrounding an entirety of the sample and the shield. 
     
     
         26 . The apparatus of  claim 21  further comprising a sputtering device, the sputtering device being capable of depositing a metal material on one or more exposed portions of the sample, while other portions of the sample are blocked by the shield. 
     
     
         27 . The apparatus of  claim 21  wherein the holder apparatus is adapted to rotate the stage in a circular manner. 
     
     
         28 . The apparatus of  claim 21  wherein the holder apparatus is adapted to move the stage in an x-y-z manner.