Housing structure

Abstract

A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6′. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6′ and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.

1 .- 14 . (canceled) 
     
     
         15 . A housing, comprising:
 a frame structure comprising a plurality of frame parts including a first frame part and a second frame part that is laterally opposite the first frame part;   a structural module connecting the first and second frame parts; and   a first optical element carried by the structural module,   wherein the housing is an EUV microlithography projection objective housing   
     
     
         16 . The housing of  claim 15 , wherein the structural module is partially disposed in openings between frame parts, or the structural module disposed is in an opening in one of the frame parts. 
     
     
         17 . The housing of  claim 15 , further comprising a mount, wherein the mount is disposed in an opening between frame parts, or the mount is disposed in an opening in one of the frame parts. 
     
     
         18 . The housing of  claim 17 , further comprising a second optical element, wherein the second optical element is carried by the mount. 
     
     
         19 . The housing of  claim 18 , wherein the frame parts, the structural module and the mount have at least approximately the same coefficient of thermal expansion. 
     
     
         20 . The housing of  claim 18 , wherein the frame parts, the structural module and the mount comprise a glass ceramic. 
     
     
         21 . The housing of  claim 18 , further comprising an actuator between the mount and the second optical element. 
     
     
         22 . The housing of  claim 18 , further comprising a plurality of actuators between the mount and the second optical element, the plurality of actuators being configured to adjust a position of the second optical element in six degrees of freedom. 
     
     
         23 . The housing of  claim 21 , further comprising a gravity compensator between the mount and the second optical element. 
     
     
         24 . The housing of  claim 15 , wherein the structural element is rigidly connected to the first and second frame parts in six degrees of freedom. 
     
     
         25 . The housing of  claim 15 , wherein the first frame part, the second frame part and the structural module have at least approximately the same coefficient of thermal expansion. 
     
     
         26 . The housing of  claim 15 , wherein the first frame part, the second frame part and the structural module comprise a glass ceramic. 
     
     
         27 . The housing of  claim 15 , wherein the structural module is connected to the frame structure via a connecting point which is inflexible in one degree of freedom and flexible in other degrees of freedom. 
     
     
         28 . A housing, comprising:
 a frame structure;   a member selected from the group consisting of a mount and a structural module, the member being connected to the frame structure via a first connecting point, the first connection point being inflexible in one degree of freedom and flexible in all other degrees of freedom; and   an optical element carried by the member,   wherein the housing is an EUV microlithography projection objective housing.   
     
     
         29 . The housing of  claim 28 , wherein the member is connected to the frame structure by multiple connecting points including the first connecting point. 
     
     
         30 . The housing of  claim 29 , wherein, for each connecting point, the connecting point is inflexible in one degree of freedom and flexible in other degrees of freedom. 
     
     
         31 . The housing of  claim 28 , wherein the frame structure and the member have at least approximately the same coefficient of thermal expansion. 
     
     
         32 . The housing of  claim 28 , wherein the frame structure and the member comprise a glass ceramic. 
     
     
         33 . The housing of  claim 28 , further comprising an actuator between the member and the optical element. 
     
     
         34 . The housing of  claim 28 , further comprising a plurality of actuators between the mount and the optical element, the plurality of actuators being configured to adjust a position the optical element in six degrees of freedom. 
     
     
         35 . The housing of  claim 34 , further comprising a gravity compensator between the member and the optical element. 
     
     
         36 . The housing of  claim 28 , wherein the member comprises a second mount. 
     
     
         37 . The housing of  claim 36 , wherein the frame structure comprises a plurality of frame parts, the second mount is disposed in an opening between frame parts, or the second mount is disposed in an opening in one of the frame parts. 
     
     
         38 . The housing of  claim 28 , wherein the frame structure comprises a plurality of frame parts, and the structural module is disposed in openings between frame parts. 
     
     
         39 . The housing of  claim 28 , wherein the frame structure comprises a first frame part and a second frame part laterally opposed to the first frame part, and the member connects laterally opposed frame parts. 
     
     
         40 . The housing of  claim 28 , wherein the frame structure comprises a plurality of frame parts. 
     
     
         41 . A housing, comprising:
 a frame structure comprising two frame parts;   a first member connected to the two frame parts;   a second member connected to one of the two frame parts; and   an optical element carried by at least one member selected from the group consisting of the first member and the second member,   wherein:
 the first and second members are selected from the group consisting of a mount and a structural module, and 
 the housing is an EUV microlithography projection objective housing. 
   
     
     
         42 . The housing of  claim 41 , wherein one of the first and second members is connected to the frame structure via a first connecting point, the first connection point is inflexible in one degree of freedom, and the first connection point is flexible in all other degrees of freedom. 
     
     
         43 . The housing of  claim 42 , wherein the member that is connected to the frame structure via the first connecting point is connected to the frame structure by multiple connecting points including the first connecting point. 
     
     
         44 . The housing of  claim 43 , wherein, for each connecting point, the connecting point is inflexible in one degree of freedom and flexible in other degrees of freedom. 
     
     
         45 . The housing of  claim 41 , wherein the frame structure, the first member and the second member have at least approximately the same coefficient of thermal expansion. 
     
     
         46 . The housing of  claim 41 , wherein the frame structure, the first member and the second member comprise a glass ceramic. 
     
     
         47 . The housing of  claim 41 , further comprising an actuator between the optical element and one of the members. 
     
     
         48 . The housing of  claim 47 , further comprising a plurality of actuators between the mount and the optical element, the plurality of actuators being configured to adjust a position the optical element in six degrees of freedom. 
     
     
         49 . The housing of  claim 48 , further comprising a gravity compensator between the optical element and one of the members. 
     
     
         50 . The housing of  claim 41 , wherein the first frame part and the second frame part are arranged laterally opposed to each other, and one of the members connects the laterally opposed frame parts. 
     
     
         51 . The housing of  claim 41 , wherein the first member is disposed in an opening between frame parts, or the first member is disposed in an opening of the two frame parts.