System and method for fabricating thin-film photovoltaic devices
Abstract
Described is a vapor trap that enables the capture of material from the condensate of a vapor. The vapor trap includes an inner module, outer module and cooling system. The inner module has a transport channel to pass a web substrate or discrete substrate, and to limit conductance of the vapor. Plenums extend from the transport channel to an outer surface of the inner module. The inner module is configured to be at a temperature that is greater than a condensation temperature of the vapor. The outer module includes collection surfaces disposed across from the outer ends of the plenums. The temperature of the collection surfaces is less that a condensation temperature of the vapor. In various embodiments, the vapor trap is a selenium trap that can be used, for example, in a copper indium gallium diselenide (CIGS) deposition system for fabrication of thin film solar cells and modules.
Claims
exact text as granted — not AI-modified1 . A vapor trap, comprising:
an inner module having an outer surface, a pair of opposing ends, a transport channel extending between the opposing ends and a plurality of plenums each extending from the transport channel to the outer surface, the transport channel having a cross section to pass a substrate and to limit conductance of a vapor, the inner module configured for maintaining a temperature that is greater than a condensation temperature of the vapor; an outer module comprising a plurality of collection surfaces each disposed at an end of a respective one of the plenums opposite to the transport channel; and a cooling system in thermal communication with the outer module and configured to maintain a temperature of each of the collection surfaces that is less that a condensation temperature of the vapor.
2 . The vapor trap of claim 1 wherein each of the collection surfaces comprises a surface of a pocket in the outer module.
3 . The vapor trap of claim 2 wherein each of the pockets has a depth and wherein the depths of the pockets decreases from one of the opposing ends to the other of the opposing ends.
4 . The vapor trap of claim 1 wherein the outer module comprises at least one coolant channel.
5 . The vapor trap of claim 1 wherein the outer module comprises a plurality of body parts configured for separation to thereby provide access to deposits accumulated on the collection surfaces.
6 . The vapor trap of claim 1 further comprising at least one heater in thermal communication with the inner module.
7 . The vapor trap of claim 1 wherein the vapor is a selenium vapor.
8 . The vapor trap of claim 1 wherein the inner module is configured for attachment to an oven.
9 . The vapor trap of claim 8 wherein the inner module comprises a graphite body.
10 . The vapor trap of claim 1 wherein the outer module comprises an aluminum body.
11 . The vapor trap of claim 10 wherein the aluminum body is a nickel-plated aluminum body.
12 . The vapor trap of claim 1 wherein the transport channel has a cross section to pass a web substrate.
13 . The vapor trap of claim 1 wherein the transport channel has a cross section to pass a discrete substrate.
14 . The vapor trap of claim 1 wherein each of the plenums extends perpendicular to the transport channel.
15 . A selenium trap, comprising:
an inner module having an outer surface, a pair of opposing ends, a transport channel extending between the opposing ends and a plurality of plenums each extending from the transport channel to the outer surface, the transport channel having a cross section to pass a substrate and to limit conductance of a selenium vapor, the inner module configured for maintaining a temperature that is greater than a condensation temperature of the selenium vapor; an outer module comprising a surface having a plurality of pockets each disposed at an end of a respective one of the plenums opposite to the transport channel; and a cooling system in thermal communication with the outer module and configured to maintain a temperature of each of the pockets that is less than a condensation temperature of the selenium vapor.
16 . The selenium trap of claim 15 wherein each of the pockets has a depth and wherein the depths of the pockets decreases from one of the opposing ends to the other of the opposing ends.
17 . The selenium trap of claim 15 wherein the outer module comprises at least one coolant channel.
18 . The selenium trap of claim 15 wherein the outer module comprises a plurality of body parts configured for separation to thereby provide access to deposits accumulated in the pockets.
19 . The selenium trap of claim 15 further comprising at least one heater in thermal communication with the inner module.
20 . The selenium trap of claim 15 wherein the inner module comprises a graphite body and the outer module comprises a nickel plated aluminum body.Cited by (0)
No later patents cite this yet.
References (0)
No backward citations on record.