Inventor · disambiguated record
Piero Sferlazzo
Also filed as: SFERLAZZO PIERO
28 granted patents·19 pending applications·1,516 citations·filing 1991–2020
97Inventor score
Files withSFERLAZZO PIERO13EATON CORP4NEXX SYSTEMS PACKAGING LLC4VARIAN SEMICONDUCTOR EQUIPMENT ASS INC4UNAXIS USA INC3
Top patents by PatentIndex Score
47 records- 0196US6972055B2Continuous flow deposition systemFINENS CORP·Filed 2003·Granted Dec 6, 2005·518 cites·32 claims
- 0296US6203406B1Aerosol surface processingSUMITOMO HEAVY INDUSTRIES·Filed 1999·Granted Mar 20, 2001·151 cites·42 claims
- 0396US5931721AAerosol surface processingSUMITOMO HEAVY INDUSTRIES·Filed 1994·Granted Aug 3, 1999·172 cites·27 claims
- 0495US8092599B2Movable injectors in rotating disc gas reactorsSFERLAZZO PIERO·Filed 2007·Granted Jan 10, 2012·29 cites·39 claims
- 0594US9706634B2Apparatus and techniques to treat substrates using directional plasma and reactive gasVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jul 11, 2017·12 cites·14 claims
- 0691US5497006AIon generating source for use in an ion implanterEATON CORP·Filed 1994·Granted Mar 5, 1996·167 cites·19 claims
- 0789US10004133B2Apparatus and techniques to treat substrates using directional plasma and reactive gasVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jun 19, 2018·5 cites·18 claims
- 0888US6495010B2Differentially-pumped material processing systemUNAXIS USA INC·Filed 2001·Granted Dec 17, 2002·34 cites·42 claims
- 0988US5967156AProcessing a surfaceKRYTEK CORP·Filed 1994·Granted Oct 19, 1999·118 cites·65 claims
- 1087US8225527B2Cooling apparatus for a web deposition systemSFERLAZZO PIERO·Filed 2010·Granted Jul 24, 2012·5 cites·8 claims
- 1185US6328858B1Multi-layer sputter deposition apparatusNEXX SYSTEMS PACKAGING LLC·Filed 1999·Granted Dec 11, 2001·49 cites·23 claims
- 1285US5523652AMicrowave energized ion source for ion implantationEATON CORP·Filed 1994·Granted Jun 4, 1996·53 cites·27 claims
- 1379US8157976B2Apparatus for cathodic vacuum-arc coating depositionDRUZ BORIS·Filed 2007·Granted Apr 17, 2012·9 cites·19 claims
- 1478US6669824B2Dual-scan thin film processing systemUNAXIS USA INC·Filed 2001·Granted Dec 30, 2003·17 cites·30 claims
- 1578US6217272B1In-line sputter deposition systemAPPLIED SCIENCE & TECH INC·Filed 1999·Granted Apr 17, 2001·45 cites·27 claims
- 1677US5811823AControl mechanisms for dosimetry control in ion implantation systemsEATON CORP·Filed 1996·Granted Sep 22, 1998·50 cites·37 claims
- 1776US9206500B2Method and apparatus for surface processing of a substrate using an energetic particle beamDRUZ BORIS·Filed 2008·Granted Dec 8, 2015·4 cites·20 claims
- 1873US6682288B2Substrate processing pallet and related substrate processing method and machineNEXX SYSTEMS PACKAGING LLC·Filed 2001·Granted Jan 27, 2004·18 cites·4 claims
- 1972US6530733B2Substrate processing pallet and related substrate processing method and machineNEXX SYSTEMS PACKAGING LLC·Filed 2001·Granted Mar 11, 2003·17 cites·30 claims
- 2068US6718076B2Acousto-optic tunable filter with segmented acousto-optic interaction regionUNAXIS USA INC·Filed 2002·Granted Apr 6, 2004·14 cites·44 claims
- 2167US8865259B2Method and system for inline chemical vapor depositionSFERLAZZO PIERO·Filed 2011·Granted Oct 21, 2014·1 cites·10 claims
- 2264US5113074AIon beam potential detection probeEATON CORP·Filed 1991·Granted May 12, 1992·17 cites·11 claims
- 2362US6821912B2Substrate processing pallet and related substrate processing method and machineNEXX SYSTEMS PACKAGING LLC·Filed 2001·Granted Nov 23, 2004·9 cites·17 claims
- 2461US11631588B2Method and apparatus for non line-of-sight dopingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Apr 18, 2023·0 cites·20 claims
- 2561US2012070916A1Movable injectors in rotating disc gas reactorsSFERLAZZO PIERO·Filed 2011·Application pending·0 cites
- 2659US2010221426A1Web Substrate Deposition SystemFLUENS CORP·Filed 2009·Application pending·0 cites
- 2759US2010291308A1Web Substrate Deposition SystemVEECO INSTR INC·Filed 2009·Application pending·0 cites
- 2859US2010310766A1Roll-to-Roll Chemical Vapor Deposition SystemVEECO COMPOUND SEMICONDUCTOR INC·Filed 2009·Application pending·0 cites
- 2959US2010310769A1Continuous Feed Chemical Vapor Deposition SystemVEECO COMPOUND SEMICONDUCTOR INC·Filed 2009·Application pending·0 cites
- 3058US2014331931A1Method and system for inline chemical vapor depositionSINGULUS MOCVD GMBH I GR·Filed 2014·Application pending·0 cites
- 3157US10541137B2Method and apparatus for non line-of-sight dopingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jan 21, 2020·0 cites·14 claims
- 3257US2007209932A1Sputter deposition system and methods of useVEECO INSTR INC·Filed 2006·Application pending·0 cites
- 3355US9869021B2Showerhead apparatus for a linear batch chemical vapor deposition systemAVENTA TECH INC·Filed 2013·Granted Jan 16, 2018·2 cites·17 claims
- 3452US2007151842A1Apparatus for reactive sputteringFLUENS CORP·Filed 2006·Application pending·0 cites
- 3548US2013255922A1Web cooling device for a vacuum processing systemSFERLAZZO PIERO·Filed 2012·Application pending·0 cites
- 3648US2007045102A1Method of sputter depositing an alloy on a substrateVEECO INSTR INC·Filed 2005·Application pending·0 cites
- 3746US2011262641A1Inline chemical vapor deposition systemAVENTA SYSTEMS LLC·Filed 2010·Application pending·0 cites
- 3845US2016071708A1Method and apparatus for surface processing of a substrate using an energetic particle beamDRUZ BORIS L·Filed 2015·Application pending·0 cites
- 3945US2010330787A1Apparatus and method for ultra-shallow implantation in a semiconductor deviceSFERLAZZO PIERO·Filed 2007·Application pending·0 cites
- 4044US2012034734A1System and method for fabricating thin-film photovoltaic devicesSFERLAZZO PIERO·Filed 2011·Application pending·0 cites
- 4143US2014033976A1Heating system for a roll-to-roll deposition systemSFERLAZZO PIERO·Filed 2012·Application pending·0 cites
- 4243US2012034733A1System and method for fabricating thin-film photovoltaic devicesSFERLAZZO PIERO·Filed 2011·Application pending·0 cites
- 4341US2012031604A1System and method for fabricating thin-film photovoltaic devicesSFERLAZZO PIERO·Filed 2011·Application pending·0 cites
- 4440US9169562B2Parallel batch chemical vapor deposition systemSFERLAZZO PIERO·Filed 2012·Granted Oct 27, 2015·0 cites·4 claims
- 4539US2013224904A1Method for fabricating thin-film photovoltaic devicesAVENTA TECHNOLOGIES INC·Filed 2013·Application pending·0 cites
- 4638US8986451B2Linear batch chemical vapor deposition systemSFERLAZZO PIERO·Filed 2010·Granted Mar 24, 2015·0 cites·19 claims
- 4736US2012034764A1System and method for fabricating thin-film photovoltaic devicesSFERLAZZO PIERO·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →