Method of detecting pattern formed on non-exposed surface of workpiece

Abstract

A method of detecting an object of detection formed in the inside of or on a non-exposed surface of a workpiece having a rugged exposed surface, the detection being made on the exposed surface side of the workpiece by use of an imaging unit. The detecting method includes: a flattening step of coating the exposed surface of the workpiece with a liquid resin transmissive to the wavelength of light to be detected by the imaging unit so as to flatten the exposed surface of the workpiece; and a detecting step of detecting the object of detection formed in the inside of or on the non-exposed surface of the workpiece by use of the imaging unit on the exposed surface side of the workpiece coated with the liquid resin, after the flattening step.

1 . A method of detecting an object of detection formed on a non-exposed surface of a workpiece having a rugged exposed surface, the detection being conducted from the exposed surface side of the workpiece by use of imaging means, the method comprising:
 a flattening step of coating the exposed surface of the workpiece with a liquid resin transmissive to wavelength of light to be detected by the imaging means and curing the resin so as to flatten the exposed surface of the workpiece; and   a detecting step of detecting the object of detection formed on the non-exposed surface of the workpiece by use of the imaging means from the exposed surface side of the workpiece coated with the liquid resin which is cured, after the flattening step.   
     
     
         2 . The method according to  claim 1 , wherein the imaging means is composed of infrared imaging means.