Thin Film Comprising Titanium Oxide as Main Component and Sintered Compact Sputtering Target Comprising Titanium Oxide as Main Component

Abstract

A thin film comprising titanium oxide as its main component includes titanium, oxygen and copper, content of Ti is 29.0 to 34.0 at % and content of Cu is 0.003 to 7.7 at % or less with remainder being oxygen and unavoidable impurities. A ratio of oxygen component to metal components, O/(2Ti+0.5Cu), is 0.96 or higher. The thin film has a high refractive index and low extinction coefficient. A sintered compact sputtering target suitable for producing the foregoing thin film is also provided and can be used to obtain a thin film with superior transmittance and low reflectance and which is effective as an interference film or protective film of an optical information recording medium, and to obtain a thin film that can be applied to a glass substrate; that is, a thin film that can be used as a heat ray reflective film, antireflection film, and interference filter.

1 . An optical interference film or a protective film of an optical information recording medium which is formed by performing DC sputtering to a target comprising titanium oxide as its main component, wherein the film includes titanium, oxygen and platinum, content of Ti is 29.0% or higher and 34.0 at % or less and content of Pt is 0.003 at % or higher and 5.7 at % or less with the remainder being oxygen and unavoidable impurities, and ratio of oxygen component to metal components, O/(2Ti+Pt), is 0.95 or higher. 
     
     
         2 . The film according to  claim 1 , wherein a refractive index of the film in a wavelength region of 400 to 410 nm is 2.60 or higher. 
     
     
         3 . The film according to  claim 2 , wherein an extinction coefficient of the film in a wavelength region of 400 to 410 nm is 0.1 or less. 
     
     
         4 . The film according to  claim 3 , wherein the extinction coefficient in the wavelength region of 400 to 410 nm is 0.05 or less. 
     
     
         5 . The film according to  claim 1 , wherein an extinction coefficient of the film in a wavelength region of 400 to 410 nm is 0.1 or less. 
     
     
         6 . The film according to  claim 1 , wherein an extinction coefficient of the film in a wavelength region of 400 to 410 nm is 0.05 or less. 
     
     
         7 . A sintered compact target for DC sputtering for forming an optical interference film or a protective film of an optical information recording medium comprising titanium oxide as its main component, wherein the target includes platinum and comprises, as its main component, titanium oxide made of titanium, oxygen and unavoidable impurities as a remainder thereof, the respective components have a composition ratio of (TiO 2-m ) 1-n Pt n  provided that 0≦m≦0.5 and 0.0001≦n≦0.15, and the target has a specific resistance of 100 Ωcm or less.