Miniature Chemical Analysis System

Abstract

An apparatus, according to one aspect, may include a chromatograph and a bulk acoustic resonator. The chromatograph may include a channel that is defined at least partially in a monolithic substrate. The channel may have an inlet to receive a sample and an outlet. A chromatography material may be included in the channel. The bulk acoustic resonator may have a first electrode and a second electrode that has a chemically functionalized surface. The chemically functionalized surface may be included in a chamber that is defined at least partially in the monolithic substrate and that is coupled with the outlet of the channel. Methods of making and using such apparatus, and systems including such apparatus, are also disclosed.

1 . An apparatus comprising:
 a chromatograph including a channel that is defined at least partially in a monolithic substrate, the channel having an inlet to receive a sample and an outlet, and the chromatograph including a chromatography material in the channel; and   a bulk acoustic resonator having first electrode and a second electrode that has a chemically functionalized surface that is included in a chamber, wherein the chamber is defined at least partially in the monolithic substrate and is coupled with the outlet of the chromatograph.   
     
     
         2 . The apparatus of  claim 1 , wherein the bulk acoustic resonator comprises a film bulk acoustic resonator. 
     
     
         3 . The apparatus of  claim 1 , wherein the first electrode comprises one or more metal traces. 
     
     
         4 . The apparatus of  claim 1 , further comprising a chemical accumulator coupled with the inlet of the channel, the chemical accumulator including a chamber that is defined at least partially in the monolithic substrate and that has a chemical accumulation material therein. 
     
     
         5 . The apparatus of  claim 4 , further comprising:
 a first heater to heat the chemical accumulation material; and   a second heater to heat the chromatography material.   
     
     
         6 . The apparatus of  claim 1 , wherein the channel of the chromatograph and the chamber of the bulk acoustic resonator are each defined at least partially within the same piece of single crystal silicon. 
     
     
         7 . An apparatus comprising:
 a chromatograph including a channel that is defined at least partially in a piece of single crystal silicon, the channel having an inlet to receive a sample, the channel having a material therein to affect progression of chemical species of the sample through the channel, and the channel having an outlet;   one or more metal traces positioned relative to the chromatograph to heat the material in the channel; and   a film bulk acoustic resonator (FBAR) detector, the FBAR detector including a first electrode, a second electrode having a coated surface, and a piezoelectric material disposed between the first and second electrodes, the FBAR detector further including a chamber that is defined at least partially in the piece of single crystal silicon, the chamber having an inlet that is coupled with the outlet of the chromatograph to receive the chemical species, wherein the coated surface of the second electrode is exposed to the chemical species received into the chamber.   
     
     
         8 . The apparatus of  claim 7 , further comprising:
 a chemical accumulator including a second chamber that is defined at least partially in the piece of single crystal silicon, the second chamber having an inlet to receive the sample, the chamber having a sorbent therein to sorb the sample, and the chamber having an outlet that is coupled with the inlet of the channel; and   one or more metal traces positioned relative to the chemical accumulator to heat the sorbent.   
     
     
         9 . The apparatus of  claim 7 , wherein the first electrode comprises one or more metal traces. 
     
     
         10 . The apparatus of  claim 7 , wherein the outlet of the channel and the inlet of the chamber of the FBAR detector are coupled via a microchannel. 
     
     
         11 . A method comprising:
 forming a channel of a chromatograph at least partially in a monolithic substrate by removing material of the monolithic substrate;   forming a chamber of a bulk acoustic resonator at least partially in the monolithic substrate by removing material of the monolithic substrate over an electrode of the bulk acoustic resonator;   introducing a chromatography material into the channel of the chromatograph; and   chemically functionalizing a surface of the electrode of the bulk acoustic resonator by coupling a material therewith.   
     
     
         12 . The method of  claim 11 , further comprising forming a second electrode of the bulk acoustic resonator by pattering a metal layer into one or more metal traces. 
     
     
         13 . The method of  claim 11 , wherein forming the channel and the chamber in the monolithic substrate comprises etching a piece of single crystal silicon. 
     
     
         14 .- 20 . (canceled)