Method and apparatus of electrophoretic deposition

Abstract

A method of electrophoretic deposition includes: providing an electrophoresis tank, an anode substrate, and a cathode substrate; disposing the anode substrate and the cathode substrate oppositely in the electrophoresis tank; adjusting relative positions of the cathode substrate and the anode substrate for varying each of the distances between corresponding regions on the cathode substrate and the anode substrate; and inputting cathode voltage and anode voltage respectively to a cathode electrode of the cathode substrate and a anode electrode of the anode substrate for performing the electrophoretic deposition.

1 . A method of electrophoretic deposition, comprising:
 providing an electrophoresis tank containing an electrophoresis buffer;   providing an anode substrate and a cathode substrate, wherein the anode substrate comprises at least one anode electrode and the cathode substrate comprises at least one cathode electrode;   disposing the anode substrate and the cathode substrate in the electrophoresis buffer, wherein the anode substrate and the cathode substrate are disposed oppositely in the electrophoresis tank;   adjusting relative positions of the cathode substrate and the anode substrate for varying each of distances between corresponding regions on the cathode substrate and the anode substrate; and   inputting cathode voltage and anode voltage respectively to at least one cathode electrode of the cathode substrate and at least one anode electrode of the anode substrate for performing the electrophoretic deposition.   
     
     
         2 . The method of electrophoretic deposition of  claim 1 , wherein a first cathode region of the cathode substrate and a first anode region of the anode substrate are disposed oppositely to each other, a second cathode region of the cathode substrate and a second anode region of the anode substrate are disposed oppositely to each other, voltage of the cathode electrode within the second cathode region is lower than voltage of the cathode electrode within the first cathode region due to an effect of voltage drop, and a distance between the second cathode region and the second anode region is smaller than a distance between the first cathode region and the first anode region. 
     
     
         3 . A method of electrophoretic deposition, comprising:
 providing an electrophoresis tank containing an electrophoresis buffer;   providing an anode substrate and a cathode substrate, wherein the anode substrate comprises a plurality of anode electrodes and the cathode substrate comprises at least one cathode electrode;   disposing the anode substrate and the cathode substrate in the electrophoresis buffer, wherein the anode substrate and the cathode substrate are disposed oppositely and parallel to each other in the electrophoresis tank; and   inputting cathode voltage to at least one cathode electrode of the cathode substrate and inputting anode voltage with different values respectively to each of the anode electrodes of the anode substrate for performing the electrophoretic deposition.   
     
     
         4 . The method of electrophoretic deposition of  claim 3 , wherein a first cathode region of the cathode substrate and a first anode region of the anode substrate are disposed oppositely to each other, a second cathode region of the cathode substrate and a second anode region of the anode substrate are disposed oppositely to each other, voltage of the cathode electrode within the second cathode region is lower than voltage of the cathode electrode within the first cathode region due to an effect of voltage drop, and voltage of the anode electrode within the second anode region is higher than voltage of the anode electrode within the first anode region. 
     
     
         5 . An apparatus of electrophoretic deposition, comprising:
 a power supply comprising an anode terminal and a cathode terminal;   an electrophoresis tank for containing an electrophoresis buffer;   a cathode substrate disposed in the electrophoresis tank, wherein the cathode substrate comprises at least one cathode electrode electrically connected to the cathode terminal of the power supply; and   an anode substrate disposed correspondingly to the cathode substrate in the electrophoresis tank, the anode substrate comprising at least one anode electrode electrically connected to the anode terminal of the power supply, wherein the anode substrate is disposed tiltedly toward the cathode substrate, and a distance between one region on the anode substrate and a corresponding region on the cathode substrate is different from a distance between another region on the anode substrate and another corresponding region on the cathode substrate.   
     
     
         6 . The apparatus of electrophoretic deposition of  claim 5 , wherein the cathode substrate has a first cathode region corresponding to a first anode region of the anode substrate, the cathode substrate has a second cathode region corresponding to a second anode region of the anode substrate, voltage of the cathode electrode within the second cathode region is lower than voltage of the cathode electrode within the first cathode region due to an effect of voltage drop, and a distance between the second cathode region and the second anode region is smaller than a distance between the first cathode region and the first anode region. 
     
     
         7 . An apparatus of electrophoretic deposition, comprising:
 a power supply comprising a plurality of anode terminals and a cathode terminal;   an electrophoresis tank for containing an electrophoresis buffer;   a cathode substrate disposed in the electrophoresis tank, wherein the cathode substrate comprises at least one cathode electrode electrically connected to the cathode terminal of the power supply; and   an anode substrate disposed parallel to the cathode substrate in the electrophoresis tank, the anode substrate comprising a plurality of anode electrodes electrically connected to the anode terminals of the power supply respectively;   wherein each of the anode terminals is employed for providing anode voltage with different values to each of the anode electrodes, and the cathode terminal is employed for providing cathode voltage to the cathode electrode.   
     
     
         8 . The apparatus of electrophoretic deposition of  claim 7 , wherein the cathode substrate has a first cathode region corresponding to a first anode region of the anode substrate, the cathode substrate has a second cathode region corresponding to a second anode region of the anode substrate, voltage of the cathode electrode within the second cathode region is lower than voltage of the cathode electrode within the first cathode region due to an effect of voltage drop, and voltage of the anode electrode within the second anode region is higher than voltage of the anode electrode within the first anode region. 
     
     
         9 . The apparatus of electrophoretic deposition of  claim 7 , wherein the anode electrodes are disposed parallel to each other.