Automated model building and model updating

Abstract

A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

1 . A computer-implemented method for creating a new model, the method comprising:
 generating a template from a previously-created model that specifies a first set of parameters associated with a manufacturing process;   monitoring one or more variables associated with the manufacturing process;   analyzing the one or more monitored variables and the first set of parameters according to a multivariate statistical analysis; and   creating, upon any of the one or more variables satisfying a threshold condition, the new model based on the template and the one or more variables.   
     
     
         2 . The method of  claim 1 , further comprising generating a second template from the new model. 
     
     
         3 . The method of  claim 1 , further comprising creating a second new model from the template when any of the one or more variables satisfy a second threshold condition. 
     
     
         4 . The method of  claim 1 , wherein the one or more variables to be monitored are specified by a user. 
     
     
         5 . The method of  claim 1 , wherein the threshold condition is specified by a user. 
     
     
         6 . The method of  claim 1 , wherein any of the one or more variables satisfying the threshold condition triggers creating the new model. 
     
     
         7 . The method of  claim 1 , wherein the one or more variables comprise time, occurrence of periodic or preventive maintenance, a result of metrology verification, a number of wafers processed, or any combination thereof. 
     
     
         8 . The method of  claim 1 , wherein the one or more variables satisfy the threshold condition when the multivariate statistical analysis of the one or more variables results in a value that exceeds a threshold value. 
     
     
         9 . The method of  claim 8 , wherein the multivariate statistical analysis involves a Hotelling-type calculation, a DModX-type calculation, a principal component analysis-type calculation, a weighted moving average-type calculation, or any combination thereof. 
     
     
         10 . The method of  claim 1 , wherein creating the new model further comprises:
 modifying the first set of parameters of the previously-created model based in part on the template and the value of the one or more variables monitored during the manufacturing process satisfying the threshold condition.   
     
     
         11 . The method of  claim 10  wherein modifying the first set of parameters comprises specifying a second set of parameters or changing one or more values of each of the first set of parameters. 
     
     
         12 . The method of  claim 1 , wherein the new model specifies parameters for a process tool, chamber, or recipe from which the one or more variables were monitored or for a second process tool, chamber, or recipe. 
     
     
         13 . A multivariate analytical system comprising:
 a processor;   a template-generating module in communication with the processor to generate a first template based on a previously-created model that includes a first set of parameters defining at least a portion of a manufacturing process;   a data acquisition module in communication with a processing tool to acquire or monitor one or more variables during the manufacturing process and provide information associated with the one or more variables to a model-generating module; and   the model-generating module to generate a new model having a second set of parameters, the new model being generated according to a statistical analysis based on the first template and the one or more variables upon the one or more variables satisfying a threshold condition.   
     
     
         14 . The system of  claim 13 , wherein the first set of parameters comprise metrology, time, duration of use of a process tool, number of wafers processed, occurrence of periodic or preventive maintenance, sequence of wafers processed, or any combination thereof. 
     
     
         15 . The system of  claim 13 , further comprising a basket or cache module to provide data to the model-generating module or the template-generating module in response to a user selection or the one or more variables satisfying the threshold condition. 
     
     
         16 . The system of  claim 13 , wherein the new model comprises the previously-created model and the second set of parameters comprises the values of the first set of parameters adjusted based on the template and the one or more variables. 
     
     
         17 . The system of  claim 13  further comprising:
 a user interface including:
 (a) a first area including one or more fields available for input of information by a user, the information corresponding to a value of a parameter of the template, and the first area including a command portion in communication with the template-generating module for, in response to the user selecting the command portion, issuing a command to create the template; 
 (b) a second area displaying one or more unique identifiers associated with each of a set of wafers having one or more data values, the one or more unique identifiers selectable by the user; 
 (c) a third area for displaying a subset of the one or more unique identifiers corresponding to a subset of wafers selected by the user; 
 (d) a fourth area in communication with the model-generating module for at least one of creating the new model or updating the previously-created model in response to the user selecting the fourth area, wherein the new model is created or the previously-created model is updated according to a statistical analysis based on the template and the one or more data values associated with the subset of wafers. 
 
 
     
     
         18 . The system of  claim 17 , wherein the user interface further comprises:
 (e) a fifth area having one or more conditions selectable by the user; and   an analyzer module in communication with the fifth area and the model-generating module for, upon determining that the one or more user-selectable conditions have been satisfied, communicating a signal to the model-generating module to create the new model or update the previously-created model.   
     
     
         19 . The system of  claim 13  wherein the statistical analysis is a multivariate statistical analysis. 
     
     
         20 . The system of  claim 19 , wherein the multivariate statistical analysis involves a Hotelling-type calculation, a DModX-type calculation, a principal component analysis-type calculation, a weighted moving average-type calculation, or any combination thereof. 
     
     
         21 . A computer-implemented method for monitoring a manufacturing process, the method comprising:
 providing a model specifying a set of parameters associated with the manufacturing process;   associating a user-selectable condition with the model, the condition including a set of user-definable expressions and a user-definable consequence;   monitoring one or more variables associated with the manufacturing process;   upon any of the monitored variables satisfying at least one expression from the set of expressions, modifying the model based on the consequence.   
     
     
         22 . The method of  claim 21 , wherein the model is modified upon satisfaction of all of the set of user-definable expressions. 
     
     
         23 . The method of  claim 21 , wherein modifying the model comprises at least one of changing an alarm limit of the model, generating a new model, updating the set of parameters specified by the model, creating a special alarm message, determining not to trigger a fault condition, or any combination thereof. 
     
     
         24 . The method of  claim 23 , wherein changing an alarm limit of the model further comprises changing a value of at least one of a T 2 -type score, a DModX-type score, a principal component analysis-type score, a weighted moving average-type score, or any combination thereof. 
     
     
         25 . A system for creating or updating a model of a manufacturing process according to a statistical analysis, the system comprising:
 (a) a processor means;   (b) a user interface means for allowing a user to communicate with the processor means, the user interface means having a first area to display one or more user-selectable models and a second area having one or more user-configurable conditions;   (c) a control means in communication with the first area of the user interface means for determining an initial value for each of one or more parameters of a manufacturing tool based on a particular user-selected model;   (d) an analyzer means in communication with the second area of the user interface means for monitoring one or more output values associated with the one or more parameters of the manufacturing tool and for determining the one or more user-configurable conditions has been satisfied; and   (e) a model-modification means in communication with the analyzer means for updating the model or creating a new model upon a determination that the one or more user-configurable conditions has been satisfied, the updated or new model based in part on the user-selected model and the one or more output values.