Magnetic head manufacturing method

Abstract

A magnetic head manufacturing method is provided. The method includes a wafer process, a rowbar process for slicing a bar-shaped rowbar from a wafer passing through the wafer process, and performing lapping, air bearing surface (ABS) formation, cleaning, and carbon protective film deposition processes on the rowbar, a write pole test process for measuring an effective track width of the magnetic heads in the bar-shaped rowbar by using a magnetic force microscope (MFM), a scanning Hall probe microscope (SHPM), or a scanning magneto resistance effect microscope (SMRM), a read element test process for measuring electromagnetic conversion characteristics of each of read elements within the bar-shaped rowbar, a slider process for dividing up each of the magnetic heads and machining the bar-shaped rowbar into individual chip shape sliders, and a head gimbal assembly (HGA) process.

1 . A magnetic head manufacturing method, adapted to manufacture a magnetic head by following processes, comprising:
 a wafer process, for performing film deposition, etching, and cleaning processes;   a rowbar process, for slicing a bar-shaped rowbar from a wafer passing through the wafer process, and performing lapping, air bearing surface (ABS) formation, cleaning, and carbon protective film deposition processes on the rowbar;   a write pole test process, for measuring an effective track width of the magnetic heads in the bar-shaped rowbar by using a magnetic force microscope (MFM), a scanning Hall probe microscope (SHPM), or a scanning magneto resistance effect microscope (SMRM);   a read element test process, for measuring electromagnetic conversion characteristics of each of read elements within the bar-shaped rowbar;   a slider process, for dividing up each of the magnetic heads and machining the bar-shaped rowbar into individual chip shape sliders, and performing a cleaning and an inspection process; and   a head gimbal assembly (HGA) process, for connecting the magnetic head already machined into the chip shape to a suspension, and performing a cleaning and an inspection process.   
     
     
         2 . A magnetic head manufacturing method, adapted to manufacture a magnetic head by following processes, comprising:
 a wafer process, for performing film deposition, eaching, and cleaning processes;   a rowbar process, for slicing a bar-shaped rowbar from a wafer passing through the wafer process, and performing lapping, air bearing surface (ABS) formation, cleaning, and carbon protective film deposition processes on the rowbar;   a write pole test process, for enabling a magnetic probe of a cantilever means of a magnetic force microscope (MFM) to perform a scanning motion along a surface of a write pole portion of the magnetic head while being maintained at a position with a distance from a recording portion of the magnetic head equivalent to a flying height of the magnetic head relative to a magnetic disk, and detect a signal representing an oscillation state of the cantilever means, and measure an effective track width of the magnetic head according to the signal in a state that the write pole portion of the magnetic head in the bar-shaped rowbar is provided with an excitation signal;   a read element test process, for measuring electromagnetic conversion characteristics of a read element within the bar-shaped rowbar;   a slider process, for dividing up each of the magnetic heads and machining the bar-shaped rowbar into individual chip shape sliders, and performing a cleaning and an inspection process; and   a head gimbal assembly (HGA) process, for connecting the magnetic head already machined into the chip shape to a suspension, and performing a cleaning and an inspection process.   
     
     
         3 . A magnetic head manufacturing method, adapted to manufacture a magnetic head by following processes, comprising:
 a wafer process, for performing film deposition, etching, and cleaning processes;   a rowbar process, for slicing a bar-shaped rowbar from a wafer passing through the wafer process, and performing lapping, air bearing surface (ABS) formation, cleaning, and carbon protective film deposition processes on the rowbar;   a write pole test process, for enabling a Hall element or a magneto resistance (MR) element mounted on a cantilever means of an atomic force microscope (AFM) to perform a scanning motion along a surface of a write pole portion of the magnetic head while being maintained at a position with a distance from a recording portion of the magnetic head equivalent to a flying height of the magnetic head relative to a magnetic disk, and detect a signal from the Hall element or the MR element, and measure an effective track width of the magnetic head according to the signal in a state that the write pole portion of the magnetic head in the bar-shaped rowbar is provided with an excitation signal;   a read element test process, for measuring electromagnetic conversion characteristics of a read element within the bar-shaped rowbar;   a slider process, for dividing up each of the magnetic heads and machining the bar-shaped rowbar into individual chip shape sliders, and performing a cleaning and an inspection process; and   a head gimbal assembly (HGA) process, for joining the magnetic head already machined into the chip shape to a suspension, and performing a cleaning and an inspection process.