US2013056087A1PendingUtilityA1

Universal fluid flow adaptor

Assignee: LAM RES CORPPriority: Oct 12, 2007Filed: Oct 29, 2012Published: Mar 7, 2013
Est. expiryOct 12, 2027(~1.2 yrs left)· nominal 20-yr term from priority
Inventors:Mark Taskar
H10P 50/00F16L 41/03Y10T137/87885Y10T137/0402Y10T137/85938
50
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Claims

Abstract

A universal fluid flow adaptor may be formed of a single structure having a plurality of vertical conduits to receive a gas flow, the plurality of vertical conduits extending through the single structure from the top surface to the bottom surface, a plurality of horizontal conduits to receive a gas flow, the plurality of horizontal conduits extending through the first side, the second side, the first end, and the second end at an interior of the single structure, wherein one or more of the plurality of vertical conduits converge with at least one of the plurality of horizontal conduits at the interior of the single structure, and wherein one or more of the plurality of horizontal conduits converge to form at least one cross-shaped conduit at the interior of the single structure.

Claims

exact text as granted — not AI-modified
1 . A universal fluid flow adaptor formed of a single structure having a top surface opposite a bottom surface, a first side opposite a second side, and a first end opposite a second end, the universal fluid flow adaptor comprising:
 a plurality of vertical conduits to receive a gas flow, the plurality of vertical conduits extending through the single structure from the top surface to the bottom surface;   a plurality of horizontal conduits to receive a gas flow, the plurality of horizontal conduits extending through the first side, the second side, the first end, and the second end at an interior of the single structure;   wherein one or more of the plurality of vertical conduits converge with at least one of the plurality of horizontal conduits at the interior of the single structure, and   wherein one or more of the plurality of horizontal conduits converge to form at least one cross-shaped conduit at the interior of the single structure.   
     
     
         2 . The adaptor of  claim 1 , further comprising at least one sealing member designed to seal at least one of the plurality of horizontal conduits or at least one of the plurality of vertical conduits. 
     
     
         3 . The adaptor of  claim 1 , further comprising at least one connector designed to receive a gas flow, the at least one connector coupled to the at least one of the plurality of horizontal conduits or at least one of the plurality of vertical conduits. 
     
     
         4 . The adaptor of  claim 1 , further comprising a test port extending outwardly from the adaptor, wherein the test port is in fluid communication with at least one of the plurality of vertical conduits or at least one of the plurality of horizontal conduits. 
     
     
         5 . The adaptor of  claim 1 , wherein the plurality of vertical conduits are coupled to at least one gas delivery component. 
     
     
         6 . A method for forming a universal fluid flow adaptor from a single structure, comprising:
 forming a plurality of vertical conduits to receive a fluid flow, the plurality of vertical conduits extending through a top surface to a bottom surface;   creating a plurality of horizontal conduits to receive a fluid flow, the plurality of horizontal conduits extending through a first side, a second side, a first end, and a second end;   wherein one or more of the plurality of vertical conduits converge with at least one of the plurality of horizontal conduits at an interior of the single structure, and   wherein one or more of the plurality of horizontal conduits converge to form a cross-shaped conduit at the interior of the single structure.   
     
     
         7 . The method of  claim 6 , further comprising sealing at least one of the plurality of horizontal conduits or the at least one of the plurality of vertical conduits with a sealing member. 
     
     
         8 . The method of  claim 7 , wherein the sealing further comprises welding the sealing member to the at least one of the plurality of horizontal conduit or the at least one of the plurality of vertical conduit. 
     
     
         9 . The method of  claim 6 , further comprising welding at least one connector to at least one of the plurality of horizontal conduits or at least one of the plurality of vertical conduits. 
     
     
         10 . The method of  claim 6 , further comprising welding at least one test port to at least one of the plurality of vertical conduits or at least one of the horizontal conduits. 
     
     
         11 . The method of  claim 10 , wherein the at least one test port extends outwardly from the adaptor. 
     
     
         12 . The method of  claim 10 , wherein the test port is in fluid communication with at least one of the plurality of horizontal conduits or at least one of the plurality of vertical conduits.

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