Inventor · disambiguated record
Mark Taskar
Also filed as: TASKAR MARK
22 granted patents·1 pending application·165 citations·filing 2005–2021
95Inventor score
Top patents by PatentIndex Score
23 records- 0196US10022689B2Fluid mixing hub for semiconductor processing toolLAM RES CORP·Filed 2015·Granted Jul 17, 2018·15 cites·20 claims
- 0294US10128087B2Configuration independent gas delivery systemLAM RES CORP·Filed 2015·Granted Nov 13, 2018·8 cites·19 claims
- 0394US7806143B2Flexible manifold for integrated gas system gas panelsLAM RES CORP·Filed 2007·Granted Oct 5, 2010·28 cites·9 claims
- 0493US8322380B2Universal fluid flow adaptorTASKAR MARK·Filed 2008·Granted Dec 4, 2012·25 cites·7 claims
- 0592US10943769B2Gas distributor and flow verifierLAM RES CORP·Filed 2018·Granted Mar 9, 2021·6 cites·20 claims
- 0688US9091397B2Shared gas panels in plasma processing chambers employing multi-zone gas feedsSHAREEF IQBAL·Filed 2012·Granted Jul 28, 2015·5 cites·10 claims
- 0788US8122910B2Flexible manifold for integrated gas system gas panelsTASKAR MARK·Filed 2010·Granted Feb 28, 2012·9 cites·7 claims
- 0887US8794267B2Gas transport delay resolution for short etch recipesSHAREEF IQBAL·Filed 2008·Granted Aug 5, 2014·17 cites·16 claims
- 0987US7784496B2Triple valve inlet assemblyLAM RES CORP·Filed 2007·Granted Aug 31, 2010·12 cites·16 claims
- 1085US10431431B2Gas supply delivery arrangement including a gas splitter for tunable gas flow controlLAM RES CORP·Filed 2015·Granted Oct 1, 2019·6 cites·9 claims
- 1185US9090972B2Gas supply systems for substrate processing chambers and methods thereforLAM RES CORP·Filed 2012·Granted Jul 28, 2015·6 cites·18 claims
- 1283US8851113B2Shared gas panels in plasma processing systemsTASKAR MARK·Filed 2012·Granted Oct 7, 2014·8 cites·19 claims
- 1377US9721763B2Systems and methods for providing gases to a process chamberLAM RES CORP·Filed 2015·Granted Aug 1, 2017·2 cites·14 claims
- 1473US8202393B2Alternate gas delivery and evacuation system for plasma processing apparatusesWONG HARRY P·Filed 2008·Granted Jun 19, 2012·8 cites·20 claims
- 1571US11532460B2Gas mixerLAM RES CORP·Filed 2021·Granted Dec 20, 2022·0 cites·20 claims
- 1670US8720478B2Optimized activation prevention mechanism for a gas delivery systemTASKAR MARK·Filed 2011·Granted May 13, 2014·2 cites·11 claims
- 1769US9335768B2Cluster mass flow devices and multi-line mass flow devices incorporating the sameLAM RES CORP·Filed 2013·Granted May 10, 2016·4 cites·20 claims
- 1868US10002747B2Methods and apparatus for supplying process gas in a plasma processing systemSHAREEF IQBAL·Filed 2012·Granted Jun 19, 2018·2 cites·11 claims
- 1964US7628168B2Optimized activation prevention assembly for a gas delivery system and methods thereforLAM RES CORP·Filed 2005·Granted Dec 8, 2009·2 cites·9 claims
- 2055US8104503B2Optimized activation prevention mechanism for a gas delivery system and methods thereforTASKAR MARK·Filed 2009·Granted Jan 31, 2012·0 cites·18 claims
- 2150US9175808B2System and method for decreasing scrubber exhaust from gas delivery panelsTASKAR MARK·Filed 2011·Granted Nov 3, 2015·0 cites·11 claims
- 2250US2013056087A1Universal fluid flow adaptorLAM RES CORP·Filed 2012·Application pending·0 cites
- 2346US9704761B2Corrosion sensor retainer assembly apparatus and method for detecting corrosionLAM RES CORP·Filed 2014·Granted Jul 11, 2017·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →