Ultrasonic cleaning device

Abstract

An ultrasonic cleaning device including an ultrasonic transducer ( 13 ) for providing ultrasonic energy to a propagation liquid ( 15 ), an ultrasonic propagation tube ( 12 ) for flowing the propagation liquid provided with the ultrasonic energy by the ultrasonic transducer, a holding mechanism disposed below the ultrasonic propagation tube for holding an object to be cleaned ( 21 ), and a cleaning liquid supply mechanism for supplying a cleaning liquid to a cleaning surface of the object to be cleaned held by the holding mechanism, and the ultrasonic propagation tube ( 12 ) is disposed so that a side surface thereof may contact a liquid film ( 19 ) of the cleaning liquid formed on the cleaning surface by supplying the cleaning liquid to the cleaning surface by the cleaning liquid supply mechanism.

1 . An ultrasonic cleaning device comprising:
 an ultrasonic transducer for providing ultrasonic energy to a cleaning liquid;   an ultrasonic propagation tube for flowing the cleaning liquid provided with the ultrasonic energy by said ultrasonic transducer;   a holding mechanism disposed below said ultrasonic propagation tube for holding an object to be cleaned; and   an outlet provided on said ultrasonic propagation tube for discharging said cleaning liquid to a cleaning surface of the object to be cleaned held by said holding mechanism.   
     
     
         2 . The ultrasonic cleaning device according to  claim 1 , wherein
 said output is a slit or a plurality of holes provided on a side wall of said ultrasonic propagation tube.   
     
     
         3 . The ultrasonic cleaning device according to  claim 2 , wherein
 said ultrasonic propagation tube is disposed so that the side surface thereof may contact a liquid film of said cleaning liquid formed on said cleaning surface by discharging the cleaning liquid to the cleaning surface from said slit or said plurality of holes.   
     
     
         4 . The ultrasonic cleaning device according to  claim 2 , wherein
 said ultrasonic transducer is disposed so as to oppose one end of said ultrasonic propagation tube, and a single or a plurality of flange portions is provided at the one end of said ultrasonic propagation tube.   
     
     
         5 . The ultrasonic cleaning device according to  claim 2 , wherein
 said ultrasonic transducer is disposed so as to oppose one end of said ultrasonic propagation tube, and the one end of said ultrasonic propagation tube has a tapered shape in which an inner diameter of the tube is getting large as getting close to said ultrasonic transducer.   
     
     
         6 . The ultrasonic cleaning device according to  claim 2 , wherein
 said propagation liquid is deionized water and a dissolved gas concentration in said deionized water is adjusted to 2 to 4.5 ppm.