Aluminum electroplating solution

Abstract

The purpose of the present invention is to provide an aluminum electroplating solution that allows aluminum electroplating to be conducted efficiently and in a short period of time, can increase the amount of electricity in the current of electroplating, and has high solubility in a nonaqueous solvent. This aluminum electroplating solution is characterized by comprising an aluminum metal salt, an ionic liquid obtained by an organic compound forming an ion pair with the aluminum metal salt, and an organic solvent having a dielectric constant of 8 or less. It is preferable for the volume percentage of the organic solvent in relation to the total volume of the ionic liquid and the organic solvent to be at least 30%, and for at least one of the following to be included as the organic solvent having a dielectric constant of 8 or less: hexane, toluene, diethyl ether, ethylacetate, cyclohexane, xylene, benzene, naphthalene, heptane, cyclopentyl methyl ether, and dioxane.

1 . An aluminum electroplating solution comprising:
 an aluminum metal salt,   an ionic liquid obtained by an organic compound forming an ion pair with the aluminum metal salt; and   an organic solvent having a dielectric constant of 8 or less,   wherein a volume fraction of the organic solvent in relation to a total volume of the ionic liquid and the organic solvent is 75% or more.   
     
     
         2 . (canceled) 
     
     
         3 . The aluminum electroplating solution according to  claim 1 , wherein the aluminum metal salt comprises at least aluminum halide. 
     
     
         4 . The aluminum electroplating solution according to  claim 1 , wherein the organic solvent is at least one kind selected from the group consisting of hexane, toluene, diethyl ether, ethylacetate, cyclohexane, xylene, benzene, naphthalene, heptane, cyclopentyl methyl ether, and dioxane. 
     
     
         5 . The aluminum electroplating solution according to  claim 1 , wherein the organic compound forming an ion pair with the aluminum metal salt comprises at least one kind selected from the group consisting of dialkyl imidazolium salt, aliphatic phosphonium salt, and quaternary ammonium salt. 
     
     
         6 . The aluminum electroplating solution according to  claim 1 , wherein a molar ratio of the aluminum metal salt in relation to the organic compound forming an ion pair with the aluminum metal salt is 1 or more. 
     
     
         7 . The aluminum electroplating solution according to  claim 1 , wherein the aluminum electroplating solution is obtained by mixing the aluminum metal salt with the organic compound forming an ion pair with the aluminum metal salt to prepare the ionic liquid, and then mixing the ionic liquid with the organic solvent. 
     
     
         8 . The aluminum electroplating solution according to  claim 1 , wherein the aluminum electroplating solution comprises a base metal salt other than an aluminum metal salt. 
     
     
         9 . The aluminum electroplating solution according to  claim 1 , wherein a molar ratio of the aluminum metal salt in relation to the organic compound forming an ion pair with the aluminum metal salt is 3 or more.