Solid-state imaging device, manufacturing method thereof, and electronic device

Abstract

A solid-state imaging device has: an imaging region in which a plurality of pixels each having a photoelectric conversion element are arranged, and a color filter. The color filter includes: filter components of a first color ( 2 G), filter components of a second color ( 2 R) formed by self-alignment and each being surrounded by the filter components of the first color ( 2 G), and filter components of a third color ( 2 B) formed by self-alignment and each being surrounded by the filter components of the first color ( 2 G).

1 . A solid-state imaging device comprising:
 an imaging region in which a plurality of pixels each having a photoelectric conversion element are arranged; and   a color filter,   wherein the color filter includes:   filter components of a first color;   filter components of a second color formed by self-alignment and each being surrounded by the filter components of the first color; and   filter components of a third color formed by self-alignment and each being surrounded by the filter components of the first color.   
     
     
         2 . The solid-state imaging device according to  claim 1 ,
 wherein in the color filter, four corners of each of the filter components of the first color contact corners of adjacent filter components of the first color so that the filter components of the first color are formed in one continuous piece.   
     
     
         3 . The solid-state imaging device according to  claim 2 ,
 wherein an inorganic film is formed on either at least the top surface of the filter components of the first color or at least the top surface of both the filter components of the second color and the filter components of the third color.   
     
     
         4 . The solid-state imaging device according to  claim 2 ,
 wherein anyone of an inorganic film, a light-shielding film, and an air gap is formed at the boundary between the filter components of different colors.   
     
     
         5 . The solid-state imaging device according to  claim 1 ,
 wherein the filter components of the first color, the second color and the third color are each made of a material film whose solid content contains no photosensitive component.   
     
     
         6 . (canceled) 
     
     
         7 . (canceled) 
     
     
         8 . (canceled) 
     
     
         9 . (canceled) 
     
     
         10 . (canceled) 
     
     
         11 . (canceled) 
     
     
         12 . (canceled) 
     
     
         13 . (canceled) 
     
     
         14 . An electronic device comprising:
 a solid-state imaging device;   an optical system for guiding incident :light into photoelectric conversion elements of the solid-state imaging device; and   a signal processing circuit,   wherein the solid-state imaging device includes an imaging region in which a plurality of pixels each having a photoelectric conversion element are arranged, and a color filter which includes filter components of a first color, filter components of a second color each surrounded by the filter components of the first color, and filter components of a third color each surrounded by the filter components of the first color.   
     
     
         15 . The electronic device according to  claim 14 , wherein in color filter, four corners of each of the filter components of the first color contact corners of adjacent filter components of the first color so that the filter components of the first color are formed in one continuous piece.