Material storage and dispensing packages and methods

Abstract

Packages and methods for storage and dispensing of materials, e.g., high purity liquid reagents and chemical mechanical polishing compositions used in the manufacture of microelectronic device products, including containment structures and methods adapted for pressure-dispensing of high-purity liquids. Liner packaging of liquid or liquid-containing media is described, in which zero or near-zero head space conformations are employed to minimize adverse effects of particle generation, formation of bubbles and degradation of contained material.

What is claimed is: 
     
         1 . A liner arranged to hold a liquid or liquid-containing material, the liner comprising:
 a first sheet including an inner ply adjacent to a separate outer ply that includes at least one of an ethylene vinyl alcohol (EVOH) layer and a nylon layer;   a second sheet including an inner ply adjacent to a separate outer ply that includes at least one of an EVOH layer and a nylon layer; and   at least one welded edge seam joining the first sheet to the second sheet proximate to edges of the first sheet and the second sheet to form a liner adapted to hold a liquid or liquid-containing material therein.