Planar interdigitated capacitor structures and methods of forming the same

Abstract

A planar interdigitated capacitor structure, methods of forming, and devices including, the same. The device includes first and second planar electrode structures including respective first and second pluralities of planar continuous rectangular plate electrode elements formed above a semiconductor substrate and extending continuously in first and second orthogonal directions substantially parallel to a plane of the substrate, and first and second conductors interconnecting the respective first and second pluralities of planar electrode elements parallel to a third axis substantially normal to the plane of the substrate. The first and second planar electrode structures are arranged with respective continuous rectangular plate electrode elements of each planar electrode structure interleaved and substantially parallel with each other between the first and second conductors. The device also includes a dielectric material between the first planar electrode structure and the second planar electrode structure.

What we claim is: 
     
         1 . A device, comprising:
 a semiconductor substrate;   a first planar electrode structure, comprising:
 a first plurality of planar continuous rectangular plate electrode elements formed above the substrate and extending continuously in first and second orthogonal directions substantially parallel to a plane of the substrate; and 
 a first conductor interconnecting the first plurality of planar electrode elements parallel to a third axis substantially normal to the plane of the substrate; 
   a second planar electrode structure, comprising:
 a second plurality of planar continuous rectangular plate electrode elements formed above the substrate and extending continuously in the first and second orthogonal directions; and 
 a second conductor interconnecting the second plurality of planar electrode elements parallel to the third axis; 
   wherein the first and second planar electrode structures are arranged with respective continuous rectangular plate electrode elements of each planar electrode structure interleaved and substantially parallel with each other between the first and second conductors; and   a dielectric material between the first planar electrode structure and the second planar electrode structure.   
     
     
         2 . The device of  claim 1 , wherein each of the first and second plurality of planar continuous rectangular plate electrode elements extend continuously from a respective first edge of the respective rectangular plate to a respective second edge of the respective rectangular plate in the first direction, from a respective first edge of the respective rectangular plate to a respective second edge of the respective rectangular plate in the second direction, and from a respective first edge of the respective rectangular plate to a respective second edge of the respective rectangular plate in a third direction parallel to the third axis. 
     
     
         3 . The device of  claim 1 , wherein the first and second conductors each comprise at least one via. 
     
     
         4 . The device of  claim 3 , wherein the dielectric material is provided between the first plurality of planar continuous rectangular plate electrode elements and the second conductor and between the second plurality of planar continuous rectangular plate electrode elements and the first conductor. 
     
     
         5 . The device of  claim 1 , further comprising:
 an insulating layer formed above the semiconductor substrate and below the first and second planar electrode structures.   
     
     
         6 . The device of  claim 1 , wherein the first conductor comprises a first plurality of conductive vias connecting the respective plurality of planar continuous rectangular plate electrode elements of the first planar electrode structure to each other and the second conductor comprises a second plurality of conductive vias connecting the respective plurality of planar continuous rectangular plate electrode elements of the second planar electrode structure to each other. 
     
     
         7 . The device of  claim 6 , wherein the first and second plurality of conductive vias comprise square vias. 
     
     
         8 . The device of  claim 6 , wherein the first and second plurality of conductive vias comprise slot vias. 
     
     
         9 . The device of  claim 6 , wherein the first and second plurality of conductive vias comprise via lines extending parallel to the second axis of each respective planar continuous rectangular plate electrode element. 
     
     
         10 . The device of  claim 1 , wherein the first plurality of planar electrode elements of the first electrode structure further comprises:
 a top planar continuous rectangular plate electrode element having a first continuous length and a first continuous width measured parallel to the first and second directions respectively;   a third plurality of planar continuous rectangular plate electrode elements having respective continuous widths substantially equal to the first continuous width and respective second continuous lengths that are shorter than the first width; and   a fourth plurality of planar continuous rectangular plate electrode elements having respective continuous widths substantially equal to the first continuous width and respective third continuous lengths that are shorter than the first and second continuous lengths;   
       and wherein the second plurality of planar electrode elements of the second electrode structure further comprises:
 a bottom planar continuous rectangular plate electrode element having a respective continuous length and a respective continuous width that are substantially equal to the first length and the first width; 
 a fifth plurality of continuous rectangular plate planar electrode elements having respective continuous widths substantially equal to the first continuous width and respective continuous lengths that are substantially equal to the second continuous lengths; and 
 a sixth plurality of planar continuous rectangular plate electrode elements having respective continuous widths substantially equal to the first continuous width and respective continuous lengths that are substantially equal to the third continuous lengths. 
 
     
     
         11 . The device of  claim 10 , wherein a respective planar continuous rectangular plate electrode element of the fourth plurality is formed between the top planar continuous rectangular plate electrode element and one respective planar continuous rectangular plate electrode element of the third plurality, a respective planar continuous rectangular plate electrode element of the sixth plurality is formed between the bottom planar continuous rectangular plate electrode element and one respective planar continuous rectangular plate electrode element of the fifth plurality and other respective planar continuous rectangular plate electrodes of the respective fourth and sixth pluralities are formed between other respective planar continuous rectangular plate electrodes of the third and fifth pluralities. 
     
     
         12 . The device of  claim 2 , wherein the first electrode structure is electrically connected to a first terminal of a first polarity and the second electrode structure is electrically connected to a second terminal of a second polarity, and wherein the first and second polarities are opposite to each other. 
     
     
         13 . The device of  claim 1 , wherein the first electrode structure is an anode and the second electrode structure is a cathode. 
     
     
         14 . A planar interdigitated capacitor structure, comprising:
 a first planar electrode structure, comprising:
 a first plurality of planar continuous rectangular plate electrode elements, each of the first plurality of planar continuous rectangular plate electrode elements extending continuously from a respective first edge of the respective rectangular plate to a respective second edge of the respective rectangular plate in first and second orthogonal directions; and 
 a first conductor interconnecting the first plurality of planar continuous rectangular plate electrode elements parallel to a third axis substantially normal to the first and second directions; 
   a second planar electrode structure, comprising:
 a second plurality of planar continuous rectangular plate electrode elements, each of the second plurality of planar continuous rectangular plate electrode elements extending continuously from a respective first edge of the respective rectangular plate to a respective second edge of the respective rectangular plate in the first and second orthogonal directions; and 
 a second conductor interconnecting the second plurality of planar continuous rectangular plate electrode elements parallel to the third axis; 
   wherein the first and second planar electrode structures are arranged with respective planar continuous rectangular plate electrode elements of each planar electrode structure interleaved and substantially parallel with each other between the first and second conductors; and   a dielectric material between the first planar electrode structure and the second planar electrode structure.   
     
     
         15 . The planar interdigitated capacitor structure of  claim 14 , wherein the first conductor comprises a first plurality of conductive vias connecting the respective plurality of planar continuous rectangular plate electrode elements of the first planar electrode structure to each other and the second conductor comprises a second plurality of conductive vias connecting the respective plurality of planar continuous rectangular plate electrode elements of the second planar electrode structure to each other. 
     
     
         16 . The planar interdigitated capacitor structure of  claim 14 , wherein the first planar electrode elements of the first electrode structure further comprises:
 a top planar continuous rectangular plate electrode element having a first continuous length and a first continuous width measured parallel to the first and second directions respectively;   a third plurality of planar continuous rectangular plate electrode elements having respective continuous widths substantially equal to the first continuous width and respective second continuous lengths that are shorter than the first width; and   a fourth plurality of planar continuous rectangular plate electrode elements having respective continuous widths substantially equal to the first continuous width and respective third continuous lengths that are shorter than the first and second continuous lengths;   
       and wherein the second plurality of planar electrode elements of the second electrode structure further comprises:
 a bottom planar continuous rectangular plate electrode element having a respective continuous length and a respective continuous width that are substantially equal to the first length and the first width; 
 a fifth plurality of continuous rectangular plate planar electrode elements having respective continuous widths substantially equal to the first continuous width and respective continuous lengths that are substantially equal to the second continuous lengths; and 
 a sixth plurality of planar continuous rectangular plate electrode elements having respective continuous widths substantially equal to the first continuous width and respective continuous lengths that are substantially equal to the third continuous lengths. 
 
     
     
         17 . The planar interdigitated capacitor structure of  claim 15 , wherein a respective planar continuous rectangular plate electrode element of the fourth plurality is formed between the top planar continuous rectangular plate electrode and one respective planar continuous rectangular plate electrode element of the third plurality, a respective planar continuous rectangular plate electrode element of the sixth plurality is formed between the bottom planar continuous rectangular plate electrode and one respective planar continuous rectangular plate electrode element of the fifth plurality and other respective planar continuous rectangular plate electrodes of the respective fourth and sixth pluralities are formed between other respective planar continuous rectangular plate electrodes of the third and fifth pluralities. 
     
     
         18 . A method of forming a planar interdigitated capacitor structure, comprising:
 forming a dielectric material over a substrate;   forming a first plurality of planar continuous rectangular plate electrode elements extending continuously in first and second orthogonal directions substantially parallel to a plane of the substrate;   interconnecting the first plurality of planar electrode elements parallel to a third axis substantially normal to a plane of the substrate to form a first planar electrode structure;   forming a second plurality of planar continuous rectangular plate electrode elements extending continuously in the first and second orthogonal directions;   interconnecting the second plurality of planar continuous rectangular plate electrode elements parallel to the third axis to form a second planar electrode structure; and   interleaving respective planar continuous rectangular plate electrode elements of the first and second pluralities between a respective edge parallel to the third axis of each planar electrode structure such that each of the first and second plurality of planar continuous rectangular plate electrode elements are substantially parallel with each other.   
     
     
         19 . The method of forming the planar interdigitated capacitor structure of  claim 18 , wherein the step of interleaving further comprises interleaving respective planar continuous rectangular plate electrode elements of the first and second pluralities such that the dielectric material is provided between the first planar electrode structure and the second planar electrode structure. 
     
     
         20 . The method of forming the planar interdigitated capacitor structure of  claim 18 , wherein the step of forming the first plurality of planar continuous rectangular plate electrode elements further comprises:
 forming a bottom planar continuous rectangular plate electrode element having a first continuous length and a first continuous width measured parallel to the first and second directions respectively;   forming a third plurality of planar continuous rectangular plate electrode elements having respective continuous widths substantially equal to the first continuous width and respective second continuous lengths that are shorter than the first continuous length;   forming a fourth plurality of planar continuous rectangular plate electrode elements having respective continuous widths substantially equal to the first continuous width and respective third continuous lengths that are shorter than the first and second continuous lengths;   
       and wherein the step of forming the second plurality of planar continuous rectangular plate electrode elements further comprises:
 forming a fifth plurality of continuous rectangular plate planar electrode elements having respective continuous widths substantially equal to the first continuous width and respective continuous lengths that are substantially equal to the second continuous lengths; 
 forming a sixth plurality of planar continuous rectangular plate electrode elements having respective continuous widths substantially equal to the first continuous width and respective continuous lengths that are substantially equal to the third continuous lengths; and 
 forming a top planar continuous rectangular plate electrode element having respective continuous length and a respective continuous width that are substantially equal to the first length and the first width; 
 
       wherein the step of forming the fourth plurality of planar continuous rectangular plate electrode elements further comprises:
 forming a respective planar continuous rectangular plate electrode element of the fourth plurality between the bottom continuous rectangular plate planar electrode element and one respective planar continuous rectangular plate electrode element of the third plurality, and; 
 forming another respective planar continuous rectangular plate electrodes of the fourth plurality between two respective planar continuous rectangular plate electrodes of the third plurality; 
 
       and wherein the step of forming the sixth plurality of planar continuous rectangular plate electrode elements further comprises:
 forming a respective planar continuous rectangular plate electrode element of the sixth plurality between the top planar continuous rectangular plate electrode and one respective planar continuous rectangular plate electrode element of the fifth plurality, and; 
 forming another respective planar continuous rectangular plate electrodes of the sixth plurality between two respective planar continuous rectangular plate electrodes of the fifth plurality.