Capacitor producing method, capacitor producing device, and capacitor producing program

Abstract

In a capacitor producing method, a bottom electrode, a thin-film dielectric, and a top electrode are deposited on a substrate so as to form a capacitor, wherein defects including particles and electrical short-circuits between the bottom electrode and the top electrode are detected before the capacitor is divided into capacitor cells. Next, defects such as particles and electrical short-circuits between the bottom electrode and the top electrode are removed before the capacitor is divided into capacitor cells.

1 . A capacitor producing device comprising:
 a defects detector that detects a defect in a capacitor that includes a bottom electrode, a thin-film dielectric, and a top electrode deposited on a substrate, before the capacitor is divided into a plurality of capacitor cells; and   a defect removal unit that removes the defects,   wherein the defect is one of particles in the capacitor and electrical short-circuits between the bottom electrode and the top electrode.   
     
     
         2 . The capacitor producing device according to  claim 1 , further comprising:
 a defects information storage unit that stores defects information representing the defects detected by the defects detector,   wherein the defect removal unit removes the defects based on the defects information stored in the defects information storage unit.   
     
     
         3 . The capacitor producing device according to  claim 1 , further comprising:
 an information processing unit that adjusts capacitor cell positions indicating positions of the capacitor cells based on the defect detected by the defect detector.   
     
     
         4 . The capacitor producing device according to  claim 3 , further comprising:
 a marker unit that forms a mark which is used to align the capacitor cells at the capacitor cell positions adjusted by the information processing unit.   
     
     
         5 . The capacitor producing device according to  claim 4 , wherein the marker unit performs laser processing. 
     
     
         6 . The capacitor producing device according to  claim 3 , wherein the defect removal unit removes the defect which remains in the capacitor cells after the information processing unit adjusts the capacitor cell positions. 
     
     
         7 . The capacitor producing device according to  claim 3 , wherein the information processing unit adjusts the capacitor cell positions so as to minimize the number of defects included in the capacitor cells. 
     
     
         8 . The capacitor producing device according to  claim 1 , wherein the defect removal unit performs laser processing. 
     
     
         9 . The capacitor producing device according to  claim 1 , wherein the defects detector performs laser scanning on the entire surface of the substrate so as to detect the defect by way of resistance variation measurement between the bottom electrode and the top electrode. 
     
     
         10 . A non-transitory computer readable medium having stored thereon a program for causing a computer to perform a capacitor producing method, comprising:
 forming a capacitor by depositing a bottom electrode and a top electrode on a substrate;   detecting a defect, including one of particles in the capacitor and electrical short-circuits between the bottom electrode and the top electrode, before dividing the capacitor into a plurality of capacitor cells; and   removing the defects.   
     
     
         11 . The non-transitory computer readable medium according to  claim 10 , further comprising:
 storing defects information representing the detected defect.   
     
     
         12 . The non-transitory computer readable medium according to  claim 10 , further comprising:
 adjusting capacitor cell positions indicating positions of the capacitor cells.   
     
     
         13 . The non-transitory computer readable medium according to  claim 12 , further comprising:
 forming a mark which is used to align the capacitor cells at the adjusted capacitor cell positions.   
     
     
         14 . The non-transitory computer readable medium according to  claim 12 , further comprising:
 removing the defects which still remain in the capacitor cells after adjusting the capacitor cell positions.   
     
     
         15 . The non-transitory computer readable medium according to  claim 12 , further comprising:
 adjusting the capacitor cell positions so as to minimize the number of defects included in the capacitor cells.