Three axis linear actuator

Abstract

A mover ( 344 ) moving a stage ( 238 ) includes a magnetic component ( 354 ), a conductor component ( 356 ), and a control system ( 324 ). Further, the conductor component ( 356 ) interacts with the magnetic component ( 354 ) when current is directed to the conductor component ( 356 ) to generate a controllable force along a first axis, a controllable force along a second axis, and a controllable force along a third axis. The conductor component ( 356 ) can include a split coil design, having a first conductor array ( 356 A) and a second conductor array ( 356 B) that is positioned substantially adjacent to the first conductor array ( 356 A). The control system ( 324 ) independently directs current to each of the conductor arrays ( 356 A, 356 B).

What is claimed is: 
     
         1 . An actuator for applying independently controlled forces to a stage along a first axis, along a second axis that is substantially perpendicular to the first axis, and along a third axis that is substantially perpendicular to the first axis and the second axis, the actuator comprising:
 a magnetic component including a plurality of magnets arranged in a first magnet array and a second magnet array, wherein all of the magnets of the first magnet array are aligned linearly along a first magnet axis that is parallel to the first axis, wherein all of the magnets of the second magnet array are aligned linearly along a second magnet axis that is parallel to the first axis, wherein the first magnet array and the second magnet array are spaced apart along the second axis to define a magnet gap;   a conductor component that is positioned in the magnet gap, the conductor component interacting with the first magnet array and the second magnet array when current is directed to the conductor component; and   a control system that directs current to the conductor component to generate a controllable force along the first axis, a controllable force along the second axis, and a controllable force along the third axis.   
     
     
         2 . The actuator of  claim 1  wherein the conductor component includes a first conductor array that includes a plurality of conductors that are aligned along a first conductor axis that is parallel to the first axis, and a second conductor array that includes a plurality of conductors that are aligned along a second conductor axis that is parallel to the first axis, wherein the first conductor array and the second conductor array are stacked along the second axis. 
     
     
         3 . The actuator of  claim 2  wherein the control system independently directs current to each of the conductors in the conductor arrays to generate the controllable force along the first axis, the controllable force along the second axis, and the controllable force along the third axis. 
     
     
         4 . The actuator of  claim 2  wherein the first conductor array is shifted along the first axis relative to the second conductor array. 
     
     
         5 . The actuator of  claim 4  wherein the control system independently directs current to the first conductor array and the second conductor array to generate a controllable moment about the third axis. 
     
     
         6 . The actuator of  claim 1  wherein the conductor component and the magnetic component are displaced relative to each other along the third axis. 
     
     
         7 . The actuator of  claim 6  wherein the conductor component includes a first endturn and a second endturn, and wherein different percentages of the first endturn and the second endturn lie within the magnetic field of the magnetic component at all times during the movement of the stage along the first axis, along the second axis, and along the third axis. 
     
     
         8 . A stage assembly that moves a device, the stage assembly including a stage that retains the device and the actuator of  claim 1  that applies forces to the stage. 
     
     
         9 . An exposure apparatus including an illumination system and the stage assembly of  claim 8  that moves the device relative to the illumination system. 
     
     
         10 . A process for manufacturing a device that includes the steps of providing a substrate and forming an image to the substrate with the exposure apparatus of  claim 9 . 
     
     
         11 . An actuator for applying independently controlled forces to a stage along a first axis, along a second axis that is substantially perpendicular to the first axis, and along a third axis that is substantially perpendicular to the first axis and the second axis, the actuator comprising:
 a magnetic component including a plurality of magnets arranged in a first magnet array that produces a magnetic field wherein all of the magnets of the first magnet array are aligned linearly along a linear, first magnet axis that is parallel to the first axis;   a conductor component that is positioned near the magnetic component in the magnetic field, the conductor component interacting with the magnetic component when current is directed to the conductor component, the conductor component including a first conductor array having a plurality of conductors that are aligned linearly along a first conductor axis that is parallel to the first axis, and a second conductor array that includes a plurality of conductors that are aligned linearly along a second conductor axis that is parallel to the first axis, wherein the first conductor array and the second conductor array are stacked along the second axis, wherein the conductor component and the magnetic component are displaced relative to each other along the third axis; and   a control system that independently directs current to the first conductor array and the second conductor array so that the conductor arrays interact with the first magnet array to generate a controllable force along the first axis, a controllable force along the second axis, and a controllable force along the third axis.   
     
     
         12 . The actuator of  claim 11  wherein the conductor component includes a first endturn and a second endturn, and wherein different percentages of the first endturn and the second endturn lie within the magnetic field of the magnetic component at all times during the movement of the stage along the first axis, along the second axis, and along the third axis. 
     
     
         13 . The actuator of  claim 11  wherein the first conductor array is shifted along the first axis relative to the second conductor array, and wherein the control system directs current to the first conductor array and the second conductor array to generate a controllable moment about the third axis. 
     
     
         14 . The actuator of  claim 13  wherein the magnetic component further includes a second linear magnet array that is spaced from the first magnet array along the second axis to define a magnet gap, wherein all of the magnets of the second magnet array are aligned linearly along a second magnet axis that is parallel to the first axis; wherein the conductor component is positioned at least partly in the magnet gap. 
     
     
         15 . A stage assembly that moves a device, the stage assembly including a stage that retains the device and the actuator of  claim 11  that applies forces to the stage. 
     
     
         16 . A method for applying independently controlled forces to a stage along a first axis, along a second axis that is substantially perpendicular to the first axis, and along a third axis that is substantially perpendicular to the first axis and the second axis, the method comprising the steps of:
 providing a magnetic component having a plurality of magnets arranged in a first magnet array and a second magnet array, wherein all of the magnets of the first magnet array are aligned linearly along a first magnet axis that is parallel to the first axis, wherein all of the magnets of the second magnet array are aligned linearly along a second magnet axis that is parallel to the first axis, wherein the first magnet array and the second magnet array are spaced apart along the second axis to define a magnet gap;   providing a conductor component that is positioned in the magnet gap, the conductor component interacting with the first magnet array and the second magnet array when current is directed to the conductor component;   coupling one of the components to the stage; and   directing current to the conductor component so that the conductor component interacts with the first magnet array and the second magnet array to generate a controllable force along the first axis, a controllable force along the second axis, and a controllable force along the third axis.   
     
     
         17 . The method of  claim 16  wherein the step of providing a conductor component includes the steps of providing a first conductor array having a plurality of conductors that are aligned along a first conductor axis that is parallel to the first axis, and providing a second conductor array that includes a plurality of conductors that are aligned along a second conductor axis that is parallel to the first axis, wherein the first conductor array and the second conductor array are stacked along the second axis. 
     
     
         18 . The method of  claim 17  wherein the step of providing a first conductor array includes the first conductor array being shifted along the first axis relative to the second conductor array, and wherein the step of directing includes directing current to the first conductor array and the second conductor array to generate a controllable moment about the third axis. 
     
     
         19 . The method of  claim 16  wherein the step of providing a conductor component includes the conductor component having a first endturn and a second endturn, and wherein different percentages of the first endturn and the second endturn are positioned between the magnet arrays at all times during the movement of the stage along the first axis, along the second axis, and along the third axis. 
     
     
         20 . A method for applying independently controlled forces to a stage along a first axis, along a second axis that is substantially perpendicular to the first axis, and along a third axis that is substantially perpendicular to the first axis and the second axis, the method comprising the steps of:
 providing a magnetic component having a plurality of magnets arranged in a first magnet array that produces a magnetic field wherein all of the magnets of the first magnet array are aligned linearly along a linear, first magnet axis that is parallel to the first axis;   providing a conductor component that is positioned near the magnetic component in the magnetic field, the conductor component interacting with the magnetic component when current is directed to the conductor component, the conductor component including a first conductor array having a plurality of conductors that are aligned linearly along a first conductor axis that is parallel to the first axis, and a second conductor array that includes a plurality of conductors that are aligned linearly along a second conductor axis that is parallel to the first axis, wherein the first conductor array and the second conductor array are stacked along the second axis, wherein the conductor component and the magnetic component are displaced relative to each other along the third axis;   coupling one of the components to the stage; and   independently directing current to the first conductor array and the second conductor array so that the conductor arrays interact with the first magnet array to generate a controllable force along the first axis, a controllable force along the second axis, and a controllable force along the third axis.