US2014237905A1PendingUtilityA1

Method of forming polishing sheet

57
Assignee: APPLIED MATERIALS INCPriority: Nov 3, 2008Filed: May 5, 2014Published: Aug 28, 2014
Est. expiryNov 3, 2028(~2.3 yrs left)· nominal 20-yr term from priority
Inventors:Benjamin A. BonnerGopalakrishna B. PrabhuErik S. RondumGregory E. MenkAnand N. IyerPeter McreynoldsGarlen C. Leung
B24B 37/205B24D 11/003B24B 21/004
57
PatentIndex Score
0
Cited by
0
References
0
Claims

Abstract

A chemical mechanical polishing article can be a single contiguous layer having a polishing surface, the layer being an elongated substantially rectangular sheet having a width and a length at least four times greater than the width. Forming a polishing article can include depositing a liquid precursor on a moving belt, at least partially curing the liquid precursor while on the moving belt to form a polishing layer, and detaching the polishing layer from the belt.

Claims

exact text as granted — not AI-modified
1 - 11 . (canceled) 
     
     
         12 . A method of forming a polishing article, comprising:
 depositing a liquid precursor on a moving belt;   at least partially curing the liquid precursor while on the moving belt to form a polishing layer; and   detaching the polishing layer from the belt.   
     
     
         13 . The method of  claim 12 , wherein depositing the liquid precursor includes depositing the liquid precursor onto a carrier sheet supported on the belt. 
     
     
         14 . The method of  claim 13 , wherein the carrier sheet comprises a thin polyethylene terephthalate polyester film. 
     
     
         15 . The method of  claim 13 , further comprising removing the polishing layer from the carrier sheet. 
     
     
         16 . The method of  claim 15 , further comprising grinding top and bottom surfaces of the polishing layer. 
     
     
         17 . The method of  claim 12 , wherein at least partially curing the liquid precursor includes heating. 
     
     
         18 . The method of  claim 12 , further comprising fully curing the polishing sheet after the polishing sheet is detached from the belt. 
     
     
         19 . The method of  claim 12 , further comprising compressing the polishing sheet. 
     
     
         20 . The method of  claim 15 , wherein compressing includes passing the polishing sheet between pinch rollers. 
     
     
         21 . The method of  claim 12 , further comprising forming grooves in the polishing sheet. 
     
     
         22 . The method of  claim 12 , further comprising trimming edges of the polishing sheet.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.