Thermal type photodetector, thermal type photodetector device, electronic instrument, and method of manufacturing thermal type photodetecgtor

Abstract

A thermal detector includes a substrate, a thermal detector element, a support member, a support post and an auxiliary support post. The support member supports the thermal detector element. The support post is disposed between the substrate and the support member so that a cavity is disposed between the substrate and the support member. The auxiliary support post is disposed between the substrate and the support member. A gap is disposed between the auxiliary support post and the support member.

What is claimed is: 
     
         1 . A thermal detector comprising:
 a substrate;   a thermal detector element;   a support member supporting the thermal detector element;   a support post disposed between the substrate and the support member so that a cavity is disposed between the substrate and the support member; and   an auxiliary support post disposed between the substrate and the support member,   a gap being disposed between the auxiliary support post and the support member.   
     
     
         2 . The thermal detector according to  claim 1 , wherein
 the support member has a recess, and   the gap is disposed between a surface of the recess and the auxiliary support post.   
     
     
         3 . The thermal detector according to  claim 1 , further comprising
 an etching stopper disposed so as to cover the substrate.   
     
     
         4 . The thermal detector according to  claim 3 , wherein
 the support post protrudes from the etching stopper.   
     
     
         5 . The thermal detector according to  claim 1 , further comprising
 a light absorber covering the thermal detector element.