Material storage and dispensing packages and methods

Abstract

Packages and methods for storage and dispensing of materials, e.g., high purity liquid reagents and chemical mechanical polishing compositions used in the manufacture of microelectronic device products, including containment structures and methods adapted for pressure-dispensing of high-purity liquids. Liner packaging of liquid or liquid-containing media is described, in which zero or near-zero head space conformations are employed to minimize adverse effects of particle generation, formation of bubbles and degradation of contained material.

1 . (canceled) 
     
     
         2 . A liner-based dispensing system, comprising:
 a liner for storing a material;   a vessel defining an interior volume within which the collapsible liner is positioned; and   a getter disposed in the interior volume and positioned between the liner and the vessel.   
     
     
         3 . The liner-based dispensing system of  claim 2 , wherein said liner is collapsible. 
     
     
         4 . The liner-based dispensing system of  claim 3 , wherein said liner is flexible. 
     
     
         5 . The liner-based dispensing system of  claim 1 , wherein said getter is chemisorptive for atmospheric gases. 
     
     
         6 . The liner-based dispensing system of  claim 5 , wherein said getter is chemisorptive for oxygen. 
     
     
         7 . The liner-based dispensing system of  claim 1 , wherein said getter comprises at least one of elemental barium and strontium. 
     
     
         8 . A fluid storage and dispensing package of  claim 2 , comprising:
 a vessel having an interior volume;   a liner in said interior volume, arranged to contain a liquid medium;   a flexible, inflatable bladder in said interior volume, said bladder being inflatable with a fluid medium to contact and retain the liner in position when the liner contains a liquid medium; and   a gas removal compartment arranged in restricted fluid penetration communication with said interior volume of said vessel, and adapted to remove gas from the interior volume of the vessel when the liner contains liquid medium and the bladder is inflated.   
     
     
         9 . The fluid storage and dispensing package of  claim 8 , wherein the liquid medium comprises a microelectronic device manufacturing reagent. 
     
     
         10 . The fluid storage and dispensing package of  claim 8 , wherein the microelectronic device manufacturing reagent comprises a material selected from the group consisting of photoresists, etchants, dopants, chemical vapor deposition reagents, solvents, wafer and tool cleaning formulations, and chemical mechanical polishing compositions. 
     
     
         11 . The fluid storage and dispensing package of  claim 8 , wherein the bladder is inflated with an inert gas, and the liner contains liquid medium. 
     
     
         12 . The fluid storage and dispensing package of  claim 8 , further comprising a cap secured to the vessel, adapted for engagement with a dispensing assembly to dispense liquid from the liner in the vessel. 
     
     
         13 . The fluid storage and dispensing package of  claim 8 , wherein the gas removal compartment comprises a compartment interior volume adapted to establish a pressure differential between the vessel interior volume and the compartment interior volume. 
     
     
         14 . The fluid storage and dispensing package of  claim 8 , wherein the gas removal compartment comprises a compartment interior volume adapted to establish a concentration differential between the vessel interior volume and the compartment interior volume. 
     
     
         15 . The fluid storage and dispensing package of  claim 8 , wherein the gas removal compartment is at least partially formed of a material that is permeable to passage of gas into the compartment. 
     
     
         16 . The fluid storage and dispensing package of  claim 8 , wherein the gas removal compartment comprises a membrane permeable to diffusion of gas into the compartment, wherein said membrane is selected from the group consisting of liner layers and non-liner membranes. 
     
     
         17 . The fluid storage and dispensing package of  claim 8 , wherein the compartment contains a getter. 
     
     
         18 . The fluid storage and dispensing package of  claim 17 , wherein the getter is chemisorptive for oxygen and nitrogen. 
     
     
         19 . The fluid storage and dispensing package of  claim 8 , wherein the compartment contains getter on an interior surface thereof. 
     
     
         20 . The fluid storage and dispensing package of  claim 8 , wherein the compartment is adapted for evacuation of gas therefrom, and maintenance of an evacuated state during containment of liquid medium in the liner. 
     
     
         21 . The fluid storage and dispensing package of  claim 20 , wherein the compartment is adapted for coupling with a vacuum pump. 
     
     
         22 . The fluid storage and dispensing package of  claim 8 , wherein the liner contains liquid medium in a zero head space conformation. 
     
     
         23 . The fluid storage and dispensing package of  claim 8 , wherein the bladder is adapted to be inflated to a first inflation state to contact and retain the liner in position when the liner contains a liquid medium during transportation and storage of the vessel, and the bladder is adapted to be inflated to a second inflation state to compress the liner for dispensing of the liquid medium therefrom during dispensing operation of the package. 
     
     
         24 . The fluid storage and dispensing package of  claim 8 , wherein the bladder and the liner are valved. 
     
     
         25 . The fluid storage and dispensing package of  claim 8 , further comprising a dispensing assembly adapted for engagement with the vessel to dispense liquid medium therefrom. 
     
     
         26 . The fluid storage and dispensing package of  claim 25 , wherein the dispensing assembly includes a dispense head and a dip tube coupled thereto. 
     
     
         27 . The fluid storage and dispensing package of  claim 25 , further comprising a gas source adapted to inflate the bladder. 
     
     
         28 . The fluid storage and dispensing package of  claim 8 , wherein the liner contains liquid medium in a non-zero head space conformation, and the bladder is inflated to a pressure above dispensing pressure of the liquid medium. 
     
     
         29 . The fluid storage and dispensing package of  claim 8 , wherein the compartment is secured to an interior surface of the vessel. 
     
     
         30 . The fluid storage and dispensing package of  claim 8 , wherein the compartment is a discrete unattached article in said interior volume of the vessel. 
     
     
         31 . The fluid storage and dispensing package of  claim 8 , wherein the compartment is permeable to in-leaking gas. 
     
     
         32 . The fluid storage and dispensing package of  claim 8 , wherein the compartment comprises an in-flow valve adapted to flow gas into the compartment. 
     
     
         33 . The fluid storage and dispensing package of  claim 8 , wherein the compartment comprises an in-flow valve adapted to flow gas into the compartment when pressure in the interior volume of the vessel exceeds a set point of said in-flow valve. 
     
     
         34 . The fluid storage and dispensing package of  claim 8 , wherein the liner is permeable to efflux of contaminant gas therethrough. 
     
     
         35 . The fluid storage and dispensing package of  claim 8 , wherein the liner is formed of material comprising a polymer selected from the group consisting of polyethylene, polypropylene, polyvinylchloride, polyurethane, polyimide, polytetrafluoroethylene, and compatible copolymers of monomers thereof, and laminates including at least one layer of said polymer or copolymer. 
     
     
         36 . The fluid storage and dispensing package of  claim 8 , wherein the bladder comprises an elastomeric material. 
     
     
         37 . The fluid storage and dispensing package of  claim 36 , wherein the elastomeric material is selected from the group consisting of natural rubbers, synthetic elastomers, natural/synthetic elastomer blends, and memory metals.