Anodizing apparatus

Abstract

An apparatus for anodizing substrates immersed in an electrolyte solution. A substrate holder mounted in a storage tank includes a first support unit having first support elements for supporting, in a liquid-tight condition, portions of the substrates, and a second support unit attachable to and detachable from the first support unit and having second support elements for supporting, in a liquid-tight condition, the remaining portions of the substrates. The second support unit includes a first portion second support unit having support elements for supporting first portions of the remaining portions of the surfaces of the substrates, and a second portion second support unit having support elements for supporting second portions of the remaining portions of the surfaces of the substrates.

What is claimed is: 
     
         1 . An anodizing apparatus for causing an anodizing reaction on substrates immersed in an electrolyte solution, comprising:
 a storage tank storing the electrolyte solution;   a substrate holder mounted in the storage tank, and including a first support unit having a plurality of first support elements arranged in a direction of arrangement of the substrates for contacting and supporting, in a liquid-tight condition, portions of surfaces of the substrates, and a second support unit attachable to and detachable from the first support unit and having a plurality of second support elements arranged in the direction of arrangement of the substrates for contacting, in a liquid-tight condition, remaining portions of the surfaces of the substrates other than the portions supported by the first support elements; and   wherein the second support unit includes a first portion second support unit having support elements for supporting first portions of the remaining portions of the surfaces of the substrates, and a second portion second support unit having support elements for supporting second portions of the remaining portions of the surfaces of the substrates.   
     
     
         2 . The apparatus according to  claim 1 , wherein said first and second support units are constructed for contacting and supporting said surfaces of said substrates, in said liquid-tight condition, wherein said surfaces are circular. 
     
     
         3 . The apparatus according to  claim 1 , wherein said first and second support units are constructed for contacting and supporting said surfaces of said substrates, in said liquid-tight condition, wherein said surfaces are square. 
     
     
         4 . The apparatus according to  claim 1 , wherein the substrate holder assumes a cylindrical appearance when the first support unit and the second support unit are connected, and includes ion-exchange membranes disposed at one end and the other end thereof in the direction of arrangement of the substrates for permitting passage of ions and blocking passage of part of the electrolyte solution in the substrate holder and part of the electrolyte solution in the storage tank. 
     
     
         5 . The apparatus according to  claim 1 , wherein the first support elements support lower portions of the surfaces which correspond to chords shorter than diameters of the substrates. 
     
     
         6 . The apparatus according to  claim 1 , wherein the second support elements have exhaust passages extending from inner surfaces to outer surfaces thereof, with upper openings thereof located above a solution level in the storage tank. 
     
     
         7 . The apparatus according to  claim 1 , wherein the first support elements have an elastic member applied to inner surfaces thereof, and grooves formed in positions where lower surfaces of the substrates are placed. 
     
     
         8 . The apparatus according to  claim 1 , wherein the first support elements have guide pins arranged at opposite sides of each groove for guiding the substrates being placed and preventing turnover of the substrates. 
     
     
         9 . The apparatus according to  claim 1 , wherein each of the guide pins has a base projecting from the elastic member, and a guide portion formed on an upper part of the base and projecting from the base toward one of the substrates. 
     
     
         10 . The apparatus according to  claim 1 , wherein a junction between the first portion second support unit and the second portion second support unit has a notch pressing mechanism for pressing notches of the substrates through elastic members provided on inner surfaces of the first portion second support unit and the second portion second support unit. 
     
     
         11 . The apparatus according to  claim 10 , wherein the notch pressing mechanism includes a slide member provided on one of the first portion second support unit and the second portion second support unit to be slidable toward centers of the substrates, and a pressing member provided on the other of the first portion second support unit and the second portion second support unit for pressing the slide member when the first portion second support unit and the second portion second support unit join each other. 
     
     
         12 . The apparatus according to  claim 6 , wherein an elastic member provided on inner surfaces of the first support elements is harder than an elastic member provided on inner surfaces of the second support elements. 
     
     
         13 . The apparatus according to  claim 1  further comprising foamed materials provided for a junction between the first portion second support unit and the first support unit, and for a junction between the second portion second support unit and the first support unit.