Inventor · disambiguated record
Subramanian Tamilmani
Also filed as: TAMILMANI SUBRAMANIAN
14 granted patents·4 pending applications·85 citations·filing 2010–2022
90Inventor score
Top patents by PatentIndex Score
18 records- 0197US9929054B2Systems and methods for laser splitting and device layer transferSOLEXEL INC·Filed 2015·Granted Mar 27, 2018·9 cites·15 claims
- 0295US9214353B2Systems and methods for laser splitting and device layer transferSOLEXEL INC·Filed 2013·Granted Dec 15, 2015·25 cites·8 claims
- 0394US8992746B2Anodizing apparatusMIYAJI YASUYOSHI·Filed 2011·Granted Mar 31, 2015·26 cites·19 claims
- 0492US10544519B2Method and apparatus for surface preparation prior to epitaxial depositionAIXTRON SE·Filed 2017·Granted Jan 28, 2020·8 cites·20 claims
- 0588US8906218B2Apparatus and methods for uniformly forming porous semiconductor on a substrateKRAMER KARL-JOSEF·Filed 2011·Granted Dec 9, 2014·6 cites·20 claims
- 0687US10829864B2Apparatus and methods for uniformly forming porous semiconductor on a substrateTRUTAG TECH INC·Filed 2017·Granted Nov 10, 2020·1 cites·22 claims
- 0783US9890465B2Apparatus and methods for uniformly forming porous semiconductor on a substrateTRUTAG TECH INC·Filed 2014·Granted Feb 13, 2018·2 cites·7 claims
- 0882US9771662B2High-throughput batch porous silicon manufacturing equipment design and processing methodsOB REALTY LLC·Filed 2015·Granted Sep 26, 2017·3 cites·15 claims
- 0973US9076642B2High-Throughput batch porous silicon manufacturing equipment design and processing methodsYONEHARA TAKAO·Filed 2011·Granted Jul 7, 2015·2 cites·21 claims
- 1066US8926803B2Porous silicon electro-etching system and methodCRAFTS DOUG·Filed 2010·Granted Jan 6, 2015·3 cites·20 claims
- 1161US9869031B2High-productivity porous semiconductor manufacturing equipmentOB REALTY LLC·Filed 2015·Granted Jan 16, 2018·0 cites·5 claims
- 1256US12410513B2Seamless gapfill of metal nitridesAPPLIED MATERIALS INC·Filed 2022·Granted Sep 9, 2025·0 cites·20 claims
- 1355US10138565B2High-throughput batch porous silicon manufacturing equipment design and processing methodsTRUTAG TECH INC·Filed 2017·Granted Nov 27, 2018·0 cites·15 claims
- 1447US2012125256A1Apparatus and method for repeatedly fabricating thin film semiconductor substrates using a templateKRAMER KARL-JOSEF·Filed 2011·Application pending·0 cites
- 1546US11133205B2Wafer out of pocket detectionAPPLIED MATERIALS INC·Filed 2020·Granted Sep 28, 2021·0 cites·20 claims
- 1643US2015299892A1Porous silicon electro-etching system and methodSOLEXEL INC·Filed 2015·Application pending·0 cites
- 1741US2015308008A1Anodizing apparatusSOLEXEL INC·Filed 2015·Application pending·0 cites
- 1840US2013154061A1Anodizing apparatus, an anodizing system having the same, and a semiconductor waferDAINIPPON SCREEN MFG·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →