Magnetic sensor and method of manufacturing the same

Abstract

Provided are a magnetic sensor and a method of manufacturing the same. In the magnetic sensor and the method of manufacturing the same, a magnetic converging plate holder with a recessed pattern having the same shape and size as those of a magnetic converging plate is formed in a die pad of a package on which a semiconductor substrate having Hall elements, a circuit, and the like is to be arranged, the magnetic converging plate manufactured through processes different from those of the semiconductor substrate on which the Hall elements and the circuit are formed is inserted into the magnetic converging plate holder, and the semiconductor substrate having the Hall elements, the circuit, and the like is arranged on the resultant so that a back surface thereof faces the die pad and the magnetic converging plate.

What is claimed is: 
     
         1 . A method of manufacturing a magnetic sensor having a magnetic converging plate, the method comprising:
 preparing a semiconductor substrate having a surface on which Hall elements are formed;   forming the magnetic converging plate, and then performing high-temperature annealing to the magnetic converging plate;   forming a die pad having a magnetic converging plate holder having a recessed shape;   accommodating the magnetic converging plate in the magnetic converging plate holder; and   bonding a back surface of the semiconductor substrate to a surface of the die pad and a surface of the magnetic converging plate.   
     
     
         2 . A method of manufacturing a magnetic sensor according to  claim 1 , wherein the high-temperature annealing is performed at a process temperature of from 800° C. to 1,200° C. 
     
     
         3 . A method of manufacturing a magnetic sensor according to  claim 1 , wherein the magnetic converging plate subjected to the high-temperature annealing has, at at least one point of an outer periphery of the magnetic converging plate, one of a recessed portion and a protruded portion for magnetic converging plate rotation direction position adjustment, and is formed into a shape that includes one of a circular shape and a square shape and has a four-fold rotational axis in a plan view except for the one of the recessed portion and the protruded portion for magnetic converging plate rotation direction position adjustment. 
     
     
         4 . A method of manufacturing a magnetic sensor according to  claim 1 , wherein the magnetic converging plate subjected to the high-temperature annealing is formed into the same planar shape as a planar shape of the magnetic converging plate holder. 
     
     
         5 . A method of manufacturing a magnetic sensor according to  claim 1 , wherein the magnetic converging plate subjected to the high-temperature annealing is formed into the same cross-sectional shape as a cross-sectional shape of the magnetic converging plate holder.