US2018093919A1PendingUtilityA1

Flouride glazes from flourine ion treatment

Assignee: APPLIED MATERIALS INCPriority: Mar 29, 2016Filed: Nov 17, 2017Published: Apr 5, 2018
Est. expiryMar 29, 2036(~9.6 yrs left)· nominal 20-yr term from priority
C03C 10/00C03C 17/245C03C 2204/00C03C 17/22C03C 2217/214C03C 2217/285C03C 10/16C03C 2209/00C03C 2218/13C03C 8/06C03C 4/18C03C 21/007
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Claims

Abstract

An article comprises a body having a coating. The coating comprising a mixture of a first oxide and a second oxide. The coating includes a glaze on a surface of the coating, the glaze comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . An article comprising:
 a body;   a coating on the body, the coating comprising a mixture of a first oxide of a first metal and a second oxide of a second metal; and   a glaze on a surface of the coating, the glaze comprising a eutectic system having a super-lattice of a first fluoride of the first metal and a second fluoride of the second metal.   
     
     
         2 . The article of  claim 1 , wherein the coating has a first thickness of approximately 1 to 200 microns. 
     
     
         3 . The article of  claim 2 , wherein the glaze has a second thickness that is 50% to 100% of the first thickness. 
     
     
         4 . The article of  claim 1 , wherein the first metal and the second metal are selected from a group consisting of Nd, La, Er, Sc, Ti, Zr, Hf, Al, Si and Y. 
     
     
         5 . The article of  claim 4 , wherein the first oxide and the second oxide are selected from a group consisting of Nd 2 O 3 , La 2 O 3 , Er 2 O 3 , Sc 2 O 3 , TiO 2 , ZrO 2 , HfO 2 , Al 2 O 3  and SiO 2 , and Y 2 O 3 . 
     
     
         6 . The article of  claim 4 , wherein the first fluoride and the second fluoride are selected from a group consisting of NdF 3 , LaF 3 , ErF 3 , ScF 3 , TiF 3 , ZrF 4 , HfF 4 , AlF 3 , SiF 4  and YF 3 . 
     
     
         7 . The article of  claim 1 , wherein the article comprises a sintered ceramic article. 
     
     
         8 . The article of  claim 1 , wherein the glaze has a thickness of 0.5 to 200 microns. 
     
     
         9 . The article of  claim 1 , wherein the first oxide is ZrO 2  and the second oxide is Y 2 O 3 . 
     
     
         10 . The article of  claim 1 , wherein the mixture of the first oxide of the first metal and the second oxide of the second metal comprises a ceramic compound comprising Y 4 Al 2 O 9  and a solid-solution of Y 2 O 3 —ZrO 2 . 
     
     
         11 . The article of  claim 1 , wherein the mixture comprises the first oxide of the first metal, the second oxide of the second metal, and a third oxide of a rare earth, and wherein the eutectic system has a super-lattice of the first fluoride, the second fluoride and a third fluoride of the rare earth. 
     
     
         12 . An article comprising:
 a ceramic body comprising a mixture of a first oxide of a first metal and a second oxide of a second metal; and   a glaze on a surface of the article, the glaze comprising a eutectic system having a super-lattice of a first fluoride of the first metal and a second fluoride of the second metal.   
     
     
         13 . The article of  claim 12 , wherein the first metal and the second metal are selected from a group consisting of Nd, La, Er, Sc, Ti, Zr, Hf, Al, Si and Y. 
     
     
         14 . The article of  claim 13 , wherein the first oxide and the second oxide are selected from a group consisting of Nd 2 O 3 , La 2 O 3 , Er 2 O 3 , Sc 2 O 3 , TiO 2 , ZrO 2 , HfO 2 , Al 2 O 3  and SiO 2 , and Y 2 O 3 . 
     
     
         15 . The article of  claim 13 , wherein the first fluoride and the second fluoride are selected from a group consisting of NdF 3 , LaF 3 , ErF 3 , ScF 3 , TiF 3 , ZrF 4 , HfF 4 , AlF 3 , SiF 4  and YF 3 . 
     
     
         16 . The article of  claim 12 , wherein the glaze has a thickness of 0.5 to 200 microns. 
     
     
         17 . The article of  claim 12 , wherein the first oxide is ZrO 2  and the second oxide is Y 2 O 3 . 
     
     
         18 . The article of  claim 12 , wherein the mixture of the first oxide of the first metal and the second oxide of the second metal comprises a ceramic compound comprising Y 4 Al 2 O 9  and a solid-solution of Y 2 O 3 —ZrO 2 . 
     
     
         19 . The article of  claim 12 , wherein the first fluoride is YF 3  and the second fluoride is ZrF 4 . 
     
     
         20 . The article of  claim 12 , wherein the mixture comprises the first oxide of the first metal, the second oxide of the second metal, and a third oxide of a rare earth, and wherein the eutectic system has a super-lattice of the first fluoride, the second fluoride and a third fluoride of the rare earth.

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