Inventor · disambiguated record
Jennifer Y. Sun
Also filed as: SUN JENNIFER · SUN JENNIFER Y · SUN JENNIFER YUN-MAN
191 granted patents·89 pending applications·3,762 citations·filing 1996–2025
99Inventor score
Files withAPPLIED MATERIALS INC237SUN JENNIFER Y14COLLINS KENNETH S5CANDESCENT TECH CORP3BANDA SUMANTH2
Top patents by PatentIndex Score
280 records- 0199US9850573B1Non-line of sight deposition of erbium based plasma resistant ceramic coatingAPPLIED MATERIALS INC·Filed 2016·Granted Dec 26, 2017·347 cites·19 claims
- 0299US9617188B2Rare-earth oxide based coatingAPPLIED MATERIALS INC·Filed 2016·Granted Apr 11, 2017·40 cites·20 claims
- 0399US9212099B2Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramicsAPPLIED MATERIALS INC·Filed 2013·Granted Dec 15, 2015·56 cites·15 claims
- 0499US9090046B2Ceramic coated article and process for applying ceramic coatingAPPLIED MATERIALS INC·Filed 2013·Granted Jul 28, 2015·68 cites·12 claims
- 0598US10570257B2Copolymerized high temperature bonding componentAPPLIED MATERIALS INC·Filed 2016·Granted Feb 25, 2020·35 cites·20 claims
- 0698US9583369B2Ion assisted deposition for rare-earth oxide based coatings on lids and nozzlesAPPLIED MATERIALS INC·Filed 2013·Granted Feb 28, 2017·46 cites·11 claims
- 0798US9440886B2Rare-earth oxide based monolithic chamber materialAPPLIED MATERIALS INC·Filed 2014·Granted Sep 13, 2016·48 cites·18 claims
- 0898US9068265B2Gas distribution plate with discrete protective elementsLUBOMIRSKY DMITRY·Filed 2012·Granted Jun 30, 2015·75 cites·20 claims
- 0998US9034199B2Ceramic article with reduced surface defect density and process for producing a ceramic articleAPPLIED MATERIALS INC·Filed 2012·Granted May 19, 2015·47 cites·20 claims
- 1098US8367227B2Plasma-resistant ceramics with controlled electrical resistivityAPPLIED MATERIALS INC·Filed 2007·Granted Feb 5, 2013·71 cites·8 claims
- 1198US8206829B2Plasma resistant coatings for plasma chamber componentsSUN JENNIFER Y·Filed 2008·Granted Jun 26, 2012·83 cites·24 claims
- 1298US8034734B2Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatusAPPLIED MATERIALS INC·Filed 2010·Granted Oct 11, 2011·90 cites·10 claims
- 1398US7696117B2Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmasAPPLIED MATERIALS INC·Filed 2007·Granted Apr 13, 2010·132 cites·35 claims
- 1497US12195839B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2023·Granted Jan 14, 2025·1 cites·20 claims
- 1597US10119188B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2017·Granted Nov 6, 2018·8 cites·20 claims
- 1697US9976211B2Plasma erosion resistant thin film coating for high temperature applicationAPPLIED MATERIALS INC·Filed 2015·Granted May 22, 2018·10 cites·13 claims
- 1797US9884787B2Rare-earth oxide based monolithic chamber materialAPPLIED MATERIALS INC·Filed 2016·Granted Feb 6, 2018·12 cites·20 claims
- 1897US9725799B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2014·Granted Aug 8, 2017·15 cites·15 claims
- 1997US9711334B2Ion assisted deposition for rare-earth oxide based thin film coatings on process ringsAPPLIED MATERIALS INC·Filed 2013·Granted Jul 18, 2017·16 cites·13 claims
- 2097US9343289B2Chemistry compatible coating material for advanced device on-wafer particle performanceAPPLIED MATERIALS INC·Filed 2013·Granted May 17, 2016·26 cites·15 claims
- 2197US8941969B2Single-body electrostatic chuckAPPLIED MATERIALS INC·Filed 2012·Granted Jan 27, 2015·44 cites·20 claims
- 2297US8937800B2Electrostatic chuck with advanced RF and temperature uniformityLUBOMIRSKY DMITRY·Filed 2013·Granted Jan 20, 2015·305 cites·20 claims
- 2397US8858745B2Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmasSUN JENNIFER Y·Filed 2008·Granted Oct 14, 2014·50 cites·6 claims
- 2497US8758858B2Method of producing a plasma-resistant thermal oxide coatingSUN JENNIFER Y·Filed 2012·Granted Jun 24, 2014·38 cites·9 claims
- 2597US8623527B2Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxideSUN JENNIFER Y·Filed 2011·Granted Jan 7, 2014·27 cites·7 claims
- 2697US8129029B2Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coatingSUN JENNIFER Y·Filed 2007·Granted Mar 6, 2012·39 cites·10 claims
- 2797US7220937B2Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contaminationAPPLIED MATERIALS INC·Filed 2004·Granted May 22, 2007·94 cites·54 claims
- 2897US6983892B2Gas distribution showerhead for semiconductor processingAPPLIED MATERIALS INC·Filed 2004·Granted Jan 10, 2006·190 cites·19 claims
- 2996US10443125B2Flourination process to create sacrificial oxy-flouride layerAPPLIED MATERIALS INC·Filed 2018·Granted Oct 15, 2019·6 cites·18 claims
- 3096US10186400B2Multi-layer plasma resistant coating by atomic layer depositionAPPLIED MATERIALS INC·Filed 2017·Granted Jan 22, 2019·12 cites·21 claims
- 3196US9869012B2Ion assisted deposition for rare-earth oxide based coatingsAPPLIED MATERIALS INC·Filed 2017·Granted Jan 16, 2018·9 cites·20 claims
- 3296US9394615B2Plasma resistant ceramic coated conductive articleAPPLIED MATERIALS INC·Filed 2012·Granted Jul 19, 2016·43 cites·20 claims
- 3396US9017765B2Protective coatings resistant to reactive plasma processingSUN JENNIFER Y·Filed 2009·Granted Apr 28, 2015·33 cites·9 claims
- 3496US8871312B2Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamberSUN JENNIFER Y·Filed 2012·Granted Oct 28, 2014·21 cites·5 claims
- 3596US7968469B2Method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformityAPPLIED MATERIALS INC·Filed 2007·Granted Jun 28, 2011·46 cites·26 claims
- 3696US6776873B1Yttrium oxide based surface coating for semiconductor IC processing vacuum chambersFiled 2002·Granted Aug 17, 2004·153 cites·6 claims
- 3795US10573497B2Multi-layer plasma resistant coating by atomic layer depositionAPPLIED MATERIALS INC·Filed 2017·Granted Feb 25, 2020·9 cites·16 claims
- 3895US9890086B2Rare-earth oxide based monolithic chamber materialAPPLIED MATERIALS INC·Filed 2016·Granted Feb 13, 2018·7 cites·14 claims
- 3995US9051219B2Semiconductor processing apparatus comprising a solid solution ceramic formed from yttrium oxide, zirconium oxide, and aluminum oxideAPPLIED MATERIALS INC·Filed 2013·Granted Jun 9, 2015·16 cites·11 claims
- 4095US7672110B2Electrostatic chuck having textured contact surfaceAPPLIED MATERIALS INC·Filed 2005·Granted Mar 2, 2010·58 cites·20 claims
- 4195US7479464B2Low temperature aerosol deposition of a plasma resistive layerAPPLIED MATERIALS INC·Filed 2006·Granted Jan 20, 2009·45 cites·21 claims
- 4294US10755900B2Multi-layer plasma erosion protection for chamber componentsAPPLIED MATERIALS INC·Filed 2018·Granted Aug 25, 2020·7 cites·18 claims
- 4394US10501843B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2017·Granted Dec 10, 2019·3 cites·20 claims
- 4494US8016948B2Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metalAPPLIED MATERIALS INC·Filed 2008·Granted Sep 13, 2011·14 cites·18 claims
- 4593US11667578B2Methods of making nanopowders, nanoceramic materials and nanoceramic componentsAPPLIED MATERIALS INC·Filed 2022·Granted Jun 6, 2023·1 cites·18 claims
- 4693US11562890B2Corrosion resistant ground shield of processing chamberAPPLIED MATERIALS INC·Filed 2018·Granted Jan 24, 2023·4 cites·20 claims
- 4793US11053581B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·2 cites·20 claims
- 4893US10443126B1Zone-controlled rare-earth oxide ALD and CVD coatingsAPPLIED MATERIALS INC·Filed 2018·Granted Oct 15, 2019·7 cites·15 claims
- 4993US9865434B2Rare-earth oxide based erosion resistant coatings for semiconductor applicationAPPLIED MATERIALS INC·Filed 2013·Granted Jan 9, 2018·5 cites·18 claims
- 5093US9850568B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2014·Granted Dec 26, 2017·11 cites·20 claims
Showing the top 50 of 280 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Jennifer Y. Sun files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →