Projection exposure methods and systems

Abstract

Projection exposure methods, systems, sub-systems and components are disclosed. Methods can include performing a first exposure to image a first sub-pattern of the pattern, where the first sub-pattern includes a plurality of first features extending in a first direction and spaced apart essentially periodically at a predominant periodicity length P in a second direction perpendicular to the first direction. The first exposure can be performed using a multipolar illumination mode that includes at least one substantially dipolar intensity distribution having two illumination poles positioned on a pole orientation axis substantially parallel to the second direction and spaced apart from each other.

1 .- 25 . (canceled) 
     
     
         26 . An illumination system, comprising:
 a plurality of optical elements constructed and arranged to receive primary radiation emitted from a light source and to generate illumination radiation incident on a mask bearing a pattern,   a pupil shaping unit configured to generate a defined multipolar intensity distribution corresponding to a selected illumination mode in a pupil surface of the illumination system during use,   wherein:
 the multipolar intensity distribution comprises a quadrupolar intensity distribution having four illumination poles positioned on two pole orientation axes and spaced apart from one another; and 
 the poles of the quadrupolar intensity distribution each have a lenticular pole shape defined by an overlapping zone of two circles with equal unit radius having a distance between the centers of the circles. 
   
     
     
         27 . The illumination system according to  claim 26 , wherein the poles of the quadrupolar intensity distribution each have a pole dimension ratio PDR=PH/PW between a pole height PH and a pole width PW according to
   PDR OPT −20%≤PDR≤PDR OPT +20%
   
       where PDR OPT =sin (α)/(1−cos(α)), α is a half pole angle, the pole width PW is measured between an inner pole edge and an outer pole edge in a direction parallel to the pole orientation axis, and the pole height is measured between pole edges in a direction perpendicular to the pole orientation axis. 
     
     
         28 . The illumination system of  claim 26 , wherein the pupil-shaping unit comprises an array of individual elements. 
     
     
         29 . The illumination system of  claim 28 , wherein the individual elements comprise diffraction gratings. 
     
     
         30 . The illumination system of  claim 28 , wherein the individual elements comprise mirrors. 
     
     
         31 . The illumination system of  claim 26 , wherein the pupil-shaping unit comprises an optical modulation device configured to controllably change an angular distribution of radiation incident on the optical modulation device such that a desired intensity distribution is obtained in the pupil surface of the illumination system. 
     
     
         32 . The illumination system of  claim 31 , wherein the optical modulation device has an array of individual elements configured to be driven individually to change the angular distribution of radiation incident on the individual elements. 
     
     
         33 . The illumination system of  claim 32 , wherein the individual elements comprise mirrors. 
     
     
         34 . The illumination system of  claim 32 , wherein the individual elements comprise diffractive optical elements or acousto-optical elements. 
     
     
         35 . The illumination system according to  claim 26 , further comprising a blocking device arranged at or close to the pupil surface of the illumination system where the basic intensity distribution is generated, or at or close to a pupil surface optically conjugate thereto; and the blocking device is designed to block areas of the basic intensity distribution which lie outside the region desired for the pole shape. 
     
     
         36 . The illumination system according to  claim 26 , wherein the pupil shaping unit further comprises a zoom lens group configured to provide a continuously variable magnification during use. 
     
     
         37 . The illumination system according to  claim 26 , wherein the pupil shaping unit further comprises a pair of axicon elements having axicon surfaces, one concave and one convex, wherein at least one of the axicon elements is movable along an optical axis of the illumination system to allow adjusting a distance between the axicon surfaces. 
     
     
         38 . An apparatus, comprising:
 an illumination system configured so that during use the illumination system guides radiation along an illumination path to generate illumination radiation incident on a mask bearing a pattern; and   a projection objective configured so that during use the projection objective projects an image of the pattern onto a radiation-sensitive substrate with projection radiation guided along a projection path,   wherein the apparatus is a projection exposure apparatus, and the illumination system is configured according to  claim 26 .   
     
     
         39 . An illumination system, comprising:
 a plurality of optical elements constructed and arranged to receive primary radiation emitted from a light source and to generate illumination radiation incident on a mask bearing a pattern,   a pupil shaping unit configured to generate a defined multipolar intensity distribution corresponding to a selected illumination mode in a pupil surface of the illumination system during use,   wherein:
 the pattern comprises features spaced apart periodically at a predominant periodicity length P where the condition 0.7λ/NA<P<λ/NA holds; 
 the multipolar intensity distribution comprises a dipolar intensity distribution having two illumination poles positioned on a pole orientation axis and spaced apart from each other at a distance d<λ/(P*NA), where λ is a nominal operation wavelength of radiation used, and NA is an image-side numerical aperture of a projection optical system used; and 
 the poles of the dipolar intensity distribution each have a pole shape selected from the group consisting of:
 a generally biconvex pole shape with a pole dimension ratio PDR=PH/PW>1 between a pole height PH and a pole width PW, where the pole width PW is measured between an inner edge and an outer pole edge in a direction parallel to the pole orientation axis, and the pole height PH is measured between inner and outer pole edges in a direction perpendicular to the pole orientation axis; and 
 a substantially lenticular pole shape defined by two convexly curved edges having opposite sense of curvature and centres of curvature essentially on a line parallel to the pole orientation axis; and 
 
 the poles of the dipolar intensity distribution each have a pole dimension ratio PDR=PH/PW according to
   PDR OPT −20%≤PDR≤PDR OPT +20%
 
 
   
       where PDR OPT =sin (α)/(1−cos(α)), α is a half pole angle, PW is measured between an inner pole edge and an outer pole edge in a direction parallel to the pole orientation axis, and PH is measured between pole edges in a direction perpendicular to the pole orientation axis. 
     
     
         40 . The illumination system of  claim 39 , wherein the pupil-shaping unit comprises an array of individual elements. 
     
     
         41 . The illumination system of  claim 40 , wherein the individual elements comprise diffraction gratings. 
     
     
         42 . The illumination system of  claim 40 , wherein the individual elements comprise mirrors. 
     
     
         43 . The illumination system of  claim 40 , wherein the individual elements are configured to be controlled individually in order to change an angular distribution of radiation influenced by the individual elements. 
     
     
         44 . The illumination system of  claim 40 , wherein during use:
 the array of individual elements is configured to generate a basic intensity distribution including areas of the poles of the dipolar intensity distribution and extending beyond the areas of the poles;   the illumination system further comprises a blocking device arranged at or close to the pupil surface of the illumination system where the basic intensity distribution is generated, or at or close to a pupil surface optically conjugate thereto; and   the blocking device is designed to block areas of the basic intensity distribution which lie outside the region desired for the pole shape.   
     
     
         45 . The illumination system of  claim 39 , wherein the pupil shaping unit further comprises a zoom lens group configured to provide a continuously variable magnification during use. 
     
     
         46 . The illumination system of  claim 45 , wherein the zoom lens group is arranged between the array of individual elements and the pupil surface of the illumination system. 
     
     
         47 . The illumination system of  claim 39 , wherein the pupil shaping unit further comprises a pair of axicon elements having axicon surfaces, one concave and one convex, wherein at least one of the axicon elements is movable along an optical axis of the illumination system to allow adjusting a distance between the axicon surfaces. 
     
     
         48 . The illumination system of  claim 47 , wherein the axicon group is arranged between the array of individual elements and the pupil surface of the illumination system. 
     
     
         49 . An apparatus, comprising:
 an illumination system configured so that during use the illumination system guides radiation along an illumination path to generate illumination radiation incident on a mask bearing a pattern; and   a projection objective configured so that during use the projection objective projects an image of the pattern onto a radiation-sensitive substrate with projection radiation guided along a projection path,   wherein the apparatus is a projection exposure apparatus, and the illumination system is configured according to  claim 39 .