US2018314162A1PendingUtilityA1

Illumination optical apparatus, exposure apparatus, and device manufacturing method

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Assignee: NIKON CORPPriority: Oct 12, 2007Filed: Jul 6, 2018Published: Nov 1, 2018
Est. expiryOct 12, 2027(~1.2 yrs left)· nominal 20-yr term from priority
Inventors:Hiroyuki Hirota
G03F 7/70116G03F 7/70833G02B 26/02G02B 26/0833G03F 7/20G02B 26/08G03F 7/70083G03F 7/70158G03F 7/70291
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Claims

Abstract

An illumination optical apparatus guides exposure light emitted from an exposure light source, to an illumination target object. The illumination optical apparatus has a plurality of spatial light modulation members arranged in an array form, and each spatial light modulation member is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . An illumination optical apparatus which guides light emitted from a light source and traveling along a predetermined optical path, to an illumination target object, the illumination optical apparatus comprising:
 a plurality of spatial light modulation members in which a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form,   wherein at least one of the spatial light modulation members is arranged in the optical path.

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