Apparatus and Method for Control of Print Gap

Abstract

Gas bearing systems, print gap control systems, and methods of print gap control are provided. The gas bearing systems can accommodate one or more print module packages. The systems and methods can be used for inkjet and/or thermal printing applications such as manufacturing organic light emitting devices (OLEDs). Gas bearing systems can employ one or more of pressurized gas and vacuum. For oxygen-sensitive applications, an inert gas, such as nitrogen gas, can be employed as the pressurized gas. Fluid channels and apertures of the gas bearing systems can be varied in terms of size and relative position to one another. Fluid channels and apertures can be grouped and paired with one or more manifolds and ultimately a pressurized gas and/or vacuum source.

What is claimed is: 
     
         1 . A method of forming a layer of a light-emitting device on a substrate, the method comprising:
 within an atmospheric enclosure, supporting a first side of the substrate on a gas bearing above a substrate support chuck, and using a print head to deposit a substance onto a second side of the substrate, opposite the first side, wherein the substance carries a film-forming material; and   processing the substance on the second side of the substrate after deposition so as to remove a carrier fluid from the substance and form the layer from the film-forming material.   
     
     
         2 . The method of  claim 1 , wherein using the print head to deposit further comprises concurrently regulating the gas bearing so as to support the substrate at a selected height relative to at least one of the substrate support chuck and the print head during the deposition of the substance. 
     
     
         3 . The method of  claim 2 , wherein concurrently regulating comprises using a first manifold and a first set of apertures to supply pressurized gas to form the bas bearing, and second manifold and a second set of apertures to vent the pressurized gas, each so as to urge the first side of the substrate to be parallel to a surface of the substrate support chuck, at the selected height. 
     
     
         4 . The method of  claim 3 , wherein concurrently regulating comprises using a first gas bearing system to support the first side of the substrate at the selected height relative to the substrate support chuck and using a second gas bearing system to maintain a transfer surface of the print head at a second height above the second side of the substrate. 
     
     
         5 . The method of  claim 1 , wherein using the print head to deposit further comprises using a system to regulate pressure of a fluid within the atmospheric enclosure so as to regulate a distance between the print head and the second side of the substrate during the deposition of the substance. 
     
     
         6 . The method of  claim 5 , wherein the fluid comprises at least one of a non-oxidizing gas, a noble gas or nitrogen gas. 
     
     
         7 . The method of  claim 1 , wherein using the print head to deposit further comprises concurrently regulating a temperature of the gas bearing so as to control a temperature of the substrate during the deposition of the substance. 
     
     
         8 . The method of  claim 1 , wherein the substrate support chuck comprises heating channels and cooling channels, and wherein using the print head to deposit further comprises concurrently regulating a temperature of the substrate by regulating the supply of heated gas and by regulating the supply of cooled gas to support the first side of the substrate above the substrate support chuck. 
     
     
         9 . The method of  claim 1 , wherein using the print head comprises using an ink jet print head to deposit the substance. 
     
     
         10 . The method of  claim 1 , wherein the substrate has a length that is at least 2.5 meters and a width that is at least 2.2 meters. 
     
     
         11 . A method of forming a layer of a light-emitting device on a substrate, the method comprising:
 within an atmospheric enclosure, supporting a first side of the substrate on a gas bearing above a substrate support chuck, regulating a temperature of the substrate, and using a print head to deposit a substance onto a second side of the temperature-regulated substrate, opposite the first side, wherein the substance carries a film-forming material; and   processing the substance on the second side of the substrate after deposition so as to remove a carrier fluid from the substance and form the layer from the film-forming material.   
     
     
         12 . The method of  claim 11 , wherein using the print head to deposit further comprises concurrently regulating the gas bearing so as to support the substrate at a selected height relative to at least one of the substrate support chuck and the print head during the deposition of the substance. 
     
     
         13 . The method of  claim 12 , wherein concurrently regulating comprises using a first manifold and a first set of apertures to supply pressurized gas to form the bas bearing, and second manifold and a second set of apertures to vent the pressurized gas, each so as to urge the first side of the substrate to be parallel to a surface of the substrate support chuck, at the selected height. 
     
     
         14 . The method of  claim 13 , wherein concurrently regulating comprises using a first gas bearing system to support the first side of the substrate at the selected height relative to the substrate support chuck and using a second gas bearing system to maintain a transfer surface of the print head at a second height above the second side of the substrate. 
     
     
         15 . The method of  claim 11 , wherein using the print head to deposit further comprises using a system to regulate pressure of a fluid within the atmospheric enclosure so as to regulate a distance between the print head and the second side of the substrate during the deposition of the substance. 
     
     
         16 . The method of  claim 15 , wherein the fluid comprises at least one of a non-oxidizing gas, a noble gas or nitrogen gas. 
     
     
         17 . The method of  claim 11 , wherein regulating the temperature of the substrate comprises regulating a temperature of the gas bearing so as to control the temperature of the substrate during the deposition of the substance. 
     
     
         18 . The method of  claim 11 , wherein the substrate support chuck comprises heating channels and cooling channels, and wherein regulating the temperature of the substrate comprises regulating the supply of heated gas and by regulating the supply of cooled gas to support the first side of the substrate above the substrate support chuck. 
     
     
         19 . The method of  claim 11 , wherein using the print head comprises using an ink jet print head to deposit the substance. 
     
     
         20 . The method of  claim 11 , wherein the substrate has a length that is at least 2.5 meters and a width that is at least 2.2 meters.